Electrical characterization of radio-frequency parallel-plate capacitively coupled discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 7, Issue 4, 1989, Pages 2774-2783

  Andries, B ^a   Ravel, G ^b   Peccoud, L ^a  

^a CEA LETI   (France)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957272228     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576177     Document Type: Article

References (14)

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