Super Large Grain Polycrystalline Silicon Obtained from Pyrolysis of Si2H6and Annealing

Japanese Journal of Applied Physics

Volumn 29, Issue 11, 1990, Pages L2105-L2107

  Scheid, Emmanuel ^a   Bielle Daspet, Danielle ^a   Mauduit, Bernadette De ^b   Taurines, Philippe ^b  

^a LAAS CNRS   (France)

^b LMSM UPS ^*  (France)

Author keywords

Disilane; LPCVD; Polysilicon; Recrystallization

Indexed keywords

EID: 84957142169     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.29.L2105     Document Type: Article

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