Semiconductor integrated circuit technology and micromachining

Sensors: A Comprehensive Survey

Volumn 1, Issue , 2008, Pages 107-168

  Ko, Wen H ^a   Suminto, James T ^b  

^a Case Western Reserve University   (United States)

^b Endevco Corporation   (United States)

Author keywords

Automation; Lithography; Polycrystalline; Segregation; Semiconductor

Indexed keywords

AUTOMATION; INTEGRATED CIRCUITS; LITHOGRAPHY; SEGREGATION (METALLOGRAPHY); SEMICONDUCTOR MATERIALS;

POLYCRYSTALLINE; SEMICONDUCTOR INTEGRATED CIRCUITS;

TIMING CIRCUITS;

EID: 84955701046     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527620128.ch5     Document Type: Chapter

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