Growth and properties of single crystal TIN films deposited by reactive magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 3, Issue 2, 1985, Pages 303-307

  Rockett, A ^b   Barnett, S A ^b   Greene, J E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84955029461     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.573255     Document Type: Article

References (23)

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