Ion-assisting magnetron sources: Principles and uses

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 3, 1990, Pages 1277-1282

  Window, B ^a   Harding, G L ^a  

^a CSIRO INDUSTRIAL PHYSICS   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84955016978     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576911     Document Type: Article

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