A novel approach in controlling the conductivity of thin films using molecular layer deposition

Applied Surface Science

Volumn 357, Issue , 2015, Pages 1319-1324

  Lushington, Andrew ^a   Liu, Jian ^a   Bannis, Mohammad N ^a   Xiao, Biwei ^a   Lawes, Stephen ^a   Li, Ruying ^a   Sun, Xueliang ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

Conductive Al 2 O 3; Electrical conductivity; Graphite; Hybrid inorganic organic films; Molecular layer deposition; Pyrolysis

Indexed keywords

ALUMINA; ALUMINUM COATINGS; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; CARBON; CHLORINATION; CHLORINE COMPOUNDS; COMPOSITE FILMS; CONDUCTIVE FILMS; ELECTRIC RESISTANCE MEASUREMENT; ETHYLENE; ETHYLENE GLYCOL; GRAPHITE; NANOCRYSTALS; PYROLYSIS; SELF ASSEMBLY;

ELECTRICAL CONDUCTIVITY; HYBRID INORGANIC-ORGANIC; MOLECULAR LAYER DEPOSITION; MOLECULAR LAYER DEPOSITIONS (MLD); REDUCING ATMOSPHERE; SHEET RESISTANCE MEASUREMENTS; TEREPHTHALOYL CHLORIDE; TUNABLE CONDUCTIVITY;

THIN FILMS;

EID: 84954564227     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2015.09.155     Document Type: Article

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