Atomic Layer Deposition of Gold Metal

Chemistry of Materials

Volumn 28, Issue 1, 2016, Pages 44-46

  Griffiths, Matthew B E ^a   Pallister, Peter J ^a   Mandia, David J ^a   Barry, Seán T ^a  

^a CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; DISCOLORATION; ENERGY DISPERSIVE SPECTROSCOPY; GOLD METALLOGRAPHY; LIGANDS; METALS; OXYGEN; PHOSPHORUS COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMBIENT CONDITIONS; CHEMICAL PRECURSORS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; LARGE PARTICLES; METAL DEPOSITION; OXIDATION STATE; OXYGEN PLASMAS; PHOSPHINE LIGANDS;

GOLD COMPOUNDS;

EID: 84954409568     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/acs.chemmater.5b04562     Document Type: Article

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