Argon and oxygen sputter etching of polystyrene, polypropylene, and poly(ethylene terephthalate) thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 6, Issue 4, 1988, Pages 2213-2220

  Grant, J L ^a   Dunn, D S ^a   McClure, D J ^a  

^a 3M COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84953681093     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.575013     Document Type: Article

References (24)

1. S. Wu, Polymer Interface and Adhesion (Dekker, New York, 1982).
2. J. H. Cross, M. W. Le May, and D. J. McClure, J. Vac. Sci. Technol. A 3, (1985).
3. K. N. Maffitt and R. F. Willson, U.S. Patent No. 4340 276 (1982).
4. A. Dilks, in ACS Symposium Series No. 162 Photon, Electron and Ion Probes of Polymer Structure and Properties (American Chemical Society, Washington, DC, 1981).
5. D. T. Clark and A. Dilks, J. Polym. Sci. Polym. Chem. Ed. 17, 957 (1979).
6. D. T. Clark and H. R. Thomas, J. Polym. Sci. Polym. Chem. Ed. 14, 1671 (1976).
7. Y. Yasuda, H. C. Marsh, S. Brandt, and C. N. Reilly, J. Polym. Sci. 15, 991 (1977).
8. D. Briggs, Polymer 25, 1377 (1984).
9. R. Holm and S. Storp, Surf. Interface Anal. 2, 96 (1980).
10. O. S. Dunn, M. W. Severson, J. L. Hylden, and J. Overend, J. Catal. 78, (1982).
11. M. K. Debe, J. Vac. Sci. Technol. 21, 74 (1982).
12. D. L. Allara and R. G. Nuzzo, Langmuir 1,52 (1985).
13. C. Korzeniewski and S. Pons, J. Vac. Sci. Technol. B 3, 1421 (1985).
14. D. S. Dunn and D. J. McClure. J. Vac. Sci. Technol. AS, 1327 (1987).
15. P. C. Painter and J. L. Koenig, J. Polym. Sci. Polym. Phys. Ed. 15,1885 (1977).
16. D. O. Hummel, In Infrared Analysis of Polymers, Resins and Additives-An Atlas, Vol. I (Wiley-Interscience, New York, 1971).
17. S. K. Bahl, D. D. Cornell, F. J. Boerio, and G. E. McGraw, Polym. Lett. Ed. 12, 13 (1974).
18. D. M. Ullevig and J. F. Evans, Anal. Chem. 52, 1467 (1980).
19. S. Storp and R. Holm, J. Electron Spectrosc. Relat. Phenom. 16, 183 (1979).
20. M. W. Le May and D. J. McClure (unpublished).
21. G. N. Taylor and T. M. Wolf, Polym. Eng. Sci. 20, 1467 (1980).
22. G. N. Taylor and T. M. Wolf, J. Electrochem. Soc. 127,2665 (1980).
23. L. F. Thompson, L. E. Stillwagon, and E. M. Doerries, J. Vac. Sci. Technol. 15, 938 (1978).
24. H. Gokan, S. Esho, and Y. Ohnishi, J. Electrochem. Soc. 130, 143 (1983).