Silicon Processing

Handbook of Semiconductor Technology

Volumn 2, Issue , 2008, Pages 1-65

  Wilkes, John G ^b   Lin, Wen ^a   Benson, Ken E ^b  

^a NOKIA RESEARCH CENTER   (United States)

^b NONE

Author keywords

Electronics manufacturers; Lithographic; Metallurgical grade silicon; Monocrystals; Pelletization

Indexed keywords

ELECTRONICS MANUFACTURERS; LITHOGRAPHIC; METALLURGICAL GRADE SILICONS (MGSI); MONO-CRYSTALS; PELLETIZATION;

SILICON;

EID: 84952934393     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527621828.ch1     Document Type: Chapter

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