Nitride-clad LOCOS isolation for 0.25μm CMOS

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1993, Pages 139-140

  Pfiester, J R ^a   Kenkare, P U ^a   Subrahmanyan, R ^a   Lin, J H ^a   Crabtree, P ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84952890440     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VLSIT.1993.760287     Document Type: Conference Paper

References (9)

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9. J. Sung et al. IEEE Elec. Del. Lett. EDL-11, p.