Control of crystalline structure and ferroelectric properties of Pb(ZrxTi1-x)O3 films by pulsed laser deposition

Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000

Volumn , Issue , 2000, Pages 276-277

  Fujita, Hirotake ^a   Goto, Satoru ^a   Agata, Sakashita ^a   Sakashita, Mitsuo ^a   Sakai, Akira ^a   Zaima, Shigeaki ^a   Yasuda, Yukio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LEAD; NANOTECHNOLOGY; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; X RAY DIFFRACTION ANALYSIS;

AS-DEPOSITED FILMS; CRYSTALLINE STRUCTURE; FERROELECTRIC PROPERTY; GROWTH CONDITIONS; OXYGEN PARTIAL PRESSURE; RAPID THERMAL ANNEALING (RTA); REMNANT POLARIZATIONS; TRIGONAL STRUCTURES;

PULSED LASERS;

EID: 84951919024     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2000.872761     Document Type: Conference Paper

References (4)

1. T. Sakuma, S. Yamamichi, S. Matsubara, H. Yamaguchi, and Y. Miyasaka, Appl. Phys. Lett. 57, 2431 (1990).
2. H. Nishikawa, M. Kanai, and T. Kawai, Jpn. J. Appl. Phys. 35, L425 (1996).
3. T. Nakamura Y. Nakao, A. Kamisawa and H. Takasu, Jpn. J. Appl. Phys. 33, 5207 (1994).
4. E. Sawaguchi, J. Phys. Soc. Jpn. 8, 615 (1953).