Kinetics of high concentration arsenic deactivation at moderate to low temperatures

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 1992-December, Issue , 1992, Pages 457-460

  Luning, S ^a   Rousseau, P M ^a   Griffin, P B ^a   Carey, P G ^a,b   Plummer, J D ^a  

^a STANFORD UNIVERSITY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; ELECTRON DEVICES;

ARSENIC DEACTIVATION; DOPANT CONCENTRATIONS; ELECTRICAL ACTIVITIES; HIGH DOSE; INACTIVE ARSENIC; LOW TEMPERATURES; MELT ANNEALING; MOBILITY REDUCTION;

CARRIER CONCENTRATION;

EID: 84951903321     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1992.307400     Document Type: Conference Paper

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