Design and fabrication of silicon micro components

MHS 2002 - Proceedings of 2002 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 2002, Pages 9-16

  Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Anisotropic magnetoresistance; Chemical analysis; Chemical technology; Dry etching; Fabrication; Integrated circuit technology; Mechatronics; Microelectronics; Micromachining; Silicon

Indexed keywords

CHEMICAL ANALYSIS; COMPOSITE MICROMECHANICS; COMPUTER AIDED DESIGN; DRY ETCHING; ENHANCED MAGNETORESISTANCE; FABRICATION; MECHATRONICS; MICROELECTRONICS; MICROMACHINING; MICROOPTICS; MICROSYSTEMS; SOCIAL SCIENCES;

CHEMICAL TECHNOLOGIES; INTEGRATED CIRCUIT TECHNOLOGY; KEY TECHNOLOGIES; MICRO TACTILE SENSORS; MICRO-CHEMICAL-ANALYSIS SYSTEMS; MICROMACHINED DEVICES; SILICON MICRO-COMPONENTS; SILICON MICROMACHINING;

SILICON;

EID: 84951794291     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2002.1058003     Document Type: Conference Paper

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