Process observation for the assembly of hybrid micro systems

MHS 2002 - Proceedings of 2002 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 2002, Pages 117-123

  Pfeifer, T ^a   Dussler, G ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Assembly systems; Consumer electronics; Costs; Humans; Instruments; Laboratories; Metrology; Production; Quality control; Vehicle safety

Indexed keywords

CONSUMER ELECTRONICS; COSTS; INSTRUMENTS; LABORATORIES; MEASUREMENTS; MICROMACHINING; PROCESS MONITORING; PRODUCTION; QUALITY ASSURANCE; QUALITY CONTROL; SOCIAL SCIENCES;

ASSEMBLY SYSTEMS; HUMANS; HYBRID MICROSYSTEM; MECHANICAL FUNCTIONS; MECHANICAL SYSTEMS; MICRO ASSEMBLY; MICRO TECHNOLOGY; VEHICLE SAFETY;

PROCESS CONTROL;

EID: 84951772623     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2002.1058021     Document Type: Conference Paper

References (9)

1. Wechsung, R.: Market Analysis for Microsystems 2000-2005 - A Report from the NEXUS Task Force. In: mst news. 2002, Nr. 2, P. 43-44
2. Pfeifer, T.; Freudenberg, R.; Dussler, G.;Bröcher, B.: Quality control and process observation for the micro assembly process. In: Measurement. Volume 30, 2001, Nr. 1, P. 1-18
3. Pfeifer, T.; Bitte, F.; Dussler, G.: Optical Metrology for Microsystem Inspection. In: Proceedings of the international seminar on precision engineering and micro technology. July 19th-20th 2000, Aachen, P. 39-52
4. Wilson, T.: Confocal Microscopy. Academic Press Inc., London, 1996
5. Sheppard, C.J.R.; Shotton, D.M.: Confocal Laser Scanning Microscopy. Information Press, Eynsham, 1997
6. Dakin, J., Culshaw, B.: Optical Fiber Sensors: Principles and Components. Vol. 1, Artech House, Inc. Norwood, MA 1988
7. Pfeifer, T.; Bröcher, B.: Multi-Sensor System for an Automatic Assembly Process. Vortrag, Symposium on Handling and Assembly of Microparts, 28.-29.11.97 Wien. In: Detter: Proceedings. Österreichische Tribologische Gesellschaft, P. 19-24
8. Pfeifer, T., Driessen, S.: Sensorentwicklung und -integration. Tagungsbeitrag zum Statuskolloquium des SFB 440, Montage hybrider Mikrosysteme. 6. September 2001, Aachen, P. 119-126
9. Pfeifer, T. Dussler, G. Bröcher, B.: Fibre-Optic Supervision for the Micro-Assembly Process Proceedings of the 1st International euspen Conference - volume 2, Bremen 1999 In Pat McKeowm u.a.: precision engineering - nanotechnology Shaker Aachen, P. 157-160