A robust numerical procedure for stress dependent 2DOxidation simulation

Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, NUPAD 1992

Volumn , Issue , 1992, Pages 21-26

  Collard, D ^a   Baccus, B ^a   Hamonic, B ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; NUMERICAL MODELS;

COMPLEX SIMULATION; NUMERICAL PROCEDURES; OXIDE LAYER; STRESS-DEPENDENT;

ROAD CONSTRUCTION;

EID: 84951349661     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NUPAD.1992.673841     Document Type: Conference Paper

References (7)

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2. C.S. Rafferty, "Simulation of stress dependent oxidation" Proceedings 2nd Int. Symp. of process physics and modeling in semiconductor technology, Electrochem. Soc., Vol. 91-4, pp. 756-771, 1991.
3. S. Isomae and S. Yamamoto, "A new two-dimensional silicon oxidation model", IEEE Trans. Comp. Aided Design, vol. CAD-6, pp. 410-417, 1987.
4. J.P. Peng, D. Chidambarrao and G.R. Srinivasan, "Novel: A non-linear viscoelastic model for thermal oxidation of silicon", COMPEL, Vol. 10, pp. 341-353, December 1991.
5. H. Humimoto, S. Odanaka, I. Nakao and H. Esaki, "Numerical modeling of non-planar oxidation coupled with stress effects", IEEE Trans. Comp. Aided Design, vol. CAD-8. pp. 599-606. June 1990.
6. D. Collard, B. Baccus and E. Dubois, "Efficient simulation of impurity segregation during oxidation of arbitrarily shaped multi-layers structures", Proceedings SISDEP-4 conference (Zurich, Switzerland), September, 1991, pp. 125-130.
7. N. Guillemot, G. Panakakis and P. Chenevier, "A new analytical model for the bird's beak", IEEE Trans. Electron Devices, Vol. ED-34, pp. 1033-1038, May 1987.