Silicon Impurity Distribution as Revealed by Pulsed MOS C-V Measurements

Journal of the Electrochemical Society

Volumn 118, Issue 1, 1971, Pages 138-141

  Van Gelder, W ^a   Nicollian, E H ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

impurity profile; pulsed C V measurements; pulsed MOS measurements; silicon impurity distribution

Indexed keywords

EID: 84951348219     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2407927     Document Type: Article

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