Mass transport through the carrier gas boundary layer in organic vapor phase deposition

Physical Review Applied

Volumn 1, Issue 3, 2014, Pages

  Rolin, Cedric ^a,b   Song, Byeongseop ^a   Forrest, Stephen R ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EFFICIENCY; MOLECULES; MORPHOLOGY; ORGANIC LASERS; SUBSTRATES; VAPOR PHASE EPITAXY;

ANALYTICAL AND NUMERICAL MODELS; GAS BOUNDARY LAYERS; LASER INDUCED FLUORESCENCE; MATERIAL UTILIZATION; MOLECULAR TRANSPORT; ORGANIC ELECTRONIC DEVICES; ORGANIC VAPOR PHASE DEPOSITION; SMALL ORGANIC MOLECULES;

BOUNDARY LAYERS;

EID: 84951293587     PISSN: None     EISSN: 23317019     Source Type: Journal    
DOI: 10.1103/PhysRevApplied.1.034002     Document Type: Article

References (28)

1. S. R. Forrest, The path to ubiquitous and low-cost organic electronic appliances on plastic, Nature (London) 428, 911 (2004). NATUAS 0028-0836 10.1038/nature02498
2. M. A. Baldo, M. Deutsch, P. Burrows, H. Gossenberger, M. Gerstenberg, V. Ban, and S. R. Forrest, Organic vapor phase deposition, Adv. Mater. 10, 1505 (1998). ADVMEW 0935-9648 10.1002/(SICI)1521-4095(199812)10:18<1505::AID-ADMA1505>3.0.CO;2-G
3. M. Shtein, H. F. Gossenberger, J. B. Benziger, and S. R. Forrest, Material transport regimes and mechanisms for growth of molecular organic thin films using low-pressure organic vapor phase deposition, J. Appl. Phys. 89, 1470 (2001). JAPIAU 0021-8979 10.1063/1.1332419
4. M. Shtein, in Organic Electronic Materials and Processes. Devices and Applications, edited by F. So (CRC Press, Boca Raton, FL, 2009), pp. 27-57.
5. C. Rolin, G. Vartanian, and S. R. Forrest, Laser induced fluorescence monitoring of the transport of small organic molecules in an organic vapor phase deposition system, J. Appl. Phys. 112, 113502 (2012). JAPIAU 0021-8979 10.1063/1.4768212
6. C. Rolin, Vapor Phase Deposition of Organic Semiconductors: Application to Field Effect Transistors (LAP Lambert Academic Publishing, Saarbrücken, Germany, 2010).
7. M. Shtein, P. Peumans, J. B. Benziger, and S. R. Forrest, Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition, J. Appl. Phys. 93, 4005 (2003). JAPIAU 0021-8979 10.1063/1.1557783
8. M. Schwambera, N. Meyer, S. Leder, M. Reinhold, M. Dauelsberg, G. Strauch, M. Heuken, H. Juergensen, T. Zhou, T. Ngo, J. Brown, M. Shtein, and S. R. Forrest, Modeling and fabrication of organic vapor phase deposition (OVPD) equipment for OLED display manufacturing, SID Symp. Dig. Tech. Pap. 33, 894 (2002). DTPSDS 0097-966X 10.1889/1.1830927
9. R. R. Lunt, B. E. Lassiter, J. B. Benziger, and S. R. Forrest, Organic vapor phase deposition for the growth of large area organic electronic devices, Appl. Phys. Lett. 95, 233305 (2009). APPLAB 0003-6951 10.1063/1.3271797
10. C. Rolin, K. Vasseur, J. Genoe, and P. Heremans, Growth of pentacene thin films by in-line organic vapor phase deposition, Org. Electron. 11, 100 (2010). OERLAU 1566-1199 10.1016/j.orgel.2009.10.005
11. G. J. McGraw and S. R. Forrest, Fluid dynamics and mass transport in organic vapor jet printing, J. Appl. Phys. 111, 043501 (2012). JAPIAU 0021-8979 10.1063/1.3680881
12. C. Rolin, K. Vasseur, B. Niesen, M. Willegems, R. Müller, S. Steudel, J. Genoe, and P. Heremans, Vapor phase growth of functional Pentacene films at atmospheric pressure, Adv. Funct. Mater. 22, 5050 (2012). AFMDC6 1616-301X 10.1002/adfm.201200896
13. R. B. Bird, W. Stewart, and E. Lightfoot, Transport Phenomena (Wiley, New York, 2006).
14. H. Schlichting and K. Gersten, Boundary-Layer Theory (Springer, Berlin, Germany, 2000), 8th ed.
15. R. Mahajan, Transport phenomena in chemical vapor-deposition systems, Adv. Heat Transf. 28, 339 (1996). AHTRAR 0065-2717 10.1016/S0065-2717(08)70143-6
16. K. F. Jensen, E. O. Einset, and D. I. Fotiadis, Flow phenomena in chemical vapor deposition of thin films, Annu. Rev. Fluid Mech. 23, 197 (1991). ARVFA3 0066-4189 10.1146/annurev.fl.23.010191.001213
17. W. L. Holstein, Thermal diffusion in metal-organic chemical vapor deposition, J. Electrochem. Soc. 135, 1788 (1988). JESOAN 0013-4651 10.1149/1.2096131
18. C. Rolin and S. R. Forrest, Diffusion coefficients of fluorescent organic molecules in inert gases, Appl. Phys. Lett. 103, 041911 (2013). APPLAB 0003-6951 10.1063/1.4816960
19. G. Wahl, Hydrodynamic description of CVD processes, Thin Solid Films 40, 13 (1977). THSFAP 0040-6090 10.1016/0040-6090(77)90099-2
20. C. Houtman, D. B. Graves, and K. F. Jensen, CVD in stagnation point flow an evaluation of the classical 1D treatment, J. Electrochem. Soc. 133, 961 (1986). JESOAN 0013-4651 10.1149/1.2108777
21. I. S. Burns and C. F. Kaminski, Diode laser induced fluorescence for gas-phase diagnostics, Z. Phys. Chem. 225, 1343 (2011). ZPCFAX 0942-9352 10.1524/zpch.2011.0182
22. A. Thöny and M. J. Rossi, Gas-phase UV spectroscopy of anthracene, xanthone, pyrene, 1-bromopyrene and 1,2,4-trichlorobenzene at elevated temperatures, J. Photochem. Photobiol. A 104, 25 (1997). JPPCEJ 1010-6030 10.1016/S1010-6030(96)04575-3
23. E. J. Bowen and J. Sahu, The effect of temperature on fluorescence of solutions, J. Phys. Chem. 63, 4 (1959). JPCHAX 0022-3654 10.1021/j150571a003
24. M. Komfort, H.-G. Löhmannsröben, and T. Salthammer, The temperature dependence of photophysical processes in perylene, tetracene and some of their derivatives, J. Photochem. Photobiol. A 51, 215 (1990). JPPCEJ 1010-6030 10.1016/1010-6030(90)87055-G
25. S. Hirayama, Temperature effect on the vapor phase fluorescence in cyano-substituted anthracenes. Reconsideration of the S1-Tn energy gap, J. Am. Chem. Soc. 103, 2934 (1981). JACSAT 0002-7863 10.1021/ja00401a004
26. J. D. Bauer, L. Bayarjargal, and B. Winkler, Ruby fluorescence lifetime measurements for temperature determinations at high ((Equation presented), (Equation presented)), High Press. Res. 32, 155 (2012). HPRSEL 0895-7959 10.1080/08957959.2011.647814
27. M. Heuken and N. Meyer, in Organic Electronics: Materials, Manufacturing and Applications, edited by H. Klauk (Wiley, Weinheim, Germany, 2006), pp. 203-232.
28. P. D. Neufeld, A. R. Janzen, and R. A. Aziz, Empirical equations to calculate 16 of the transport collision integrals (Equation presented) for the Lennard-Jones (12-6) potential, J. Chem. Phys. 57, 1100 (1972). JCPSA6 0021-9606 10.1063/1.1678363