Electrochemically Thinned N/N+ Epitaxial Silicon Method and Applications

Journal of the Electrochemical Society

Volumn 118, Issue 7, 1971, Pages 1240-1246

  Meek, Ronald L ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

anodic dissolution; integrated circuits; selective etching; silicon electrochemistry; thin silicon

Indexed keywords

EID: 84950868778     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2408292     Document Type: Letter

References (13)

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