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Volumn , Issue , 2007, Pages 1-530
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The Chemistry of Metal CVD
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFUSION BARRIERS;
DIFFUSION COATINGS;
METAL COATINGS;
METAL WORKING;
METALS;
MICROELECTRONICS;
ORGANOMETALLICS;
PETROLEUM PROSPECTING;
COMMERCIAL APPLICATIONS;
DECORATIVE COATING;
DEPTH INFORMATION;
MATERIALS SCIENTIST;
MICROELECTRONICS INDUSTRY;
ORGANOMETALLIC PRECURSORS;
PLASMA-ASSISTED METHOD;
THIN METAL COATING;
COPPER COMPOUNDS;
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EID: 84950115656
PISSN: None
EISSN: None
Source Type: Book
DOI: 10.1002/9783527615858 Document Type: Book |
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Times cited : (63)
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References (0)
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