DEVELOPMENT OF A TANGENTIAL TACTOR USING A LIGA/MEMS LINEAR MICROACTUATOR TECHNOLOGY

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1996-U, Issue , 1996, Pages 379-386

  Ghodssi, R ^a   Beebe, D J ^b   White, V ^a   Denton, D D ^a  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; INJECTION MOLDING; MICROACTUATORS;

DRIVING FORCES; LINEAR MOTION; MECHANORECEPTORS; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MICROFABRICATION PROCESS; SENSORY MODALITY; SKIN SURFACES; TACTILE COMMUNICATIONS;

MEMS;

EID: 84949860343     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1996-1378     Document Type: Conference Paper

References (25)

1. Becker, E. W., W. Ehrfeld, P. Hagmann, A. Maner and D. Munchmeyer, 1986, "Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming and Plastic Moulding (LIGA process)," Microelectronic Engineering, Vol. 4, pp. 35-56.
2. Bernstein, J., S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg, 1993, "A Micromachined Comb-drive Tuning Fork Rate Gyroscope," Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) Workshop, pp. 143-148, Fort Lauderdale, FL.
3. Burbaum, C., J. Mohr, P. Bley and W. Menz, 1991, "Fabrication of Electrostatic Microdevices by the LIGA Technique," Sensors and Materials, Vol. 3, No. 2, pp. 75-85.
4. Butikofer, R. and P. D. Lawrence, 1978, "Electrocutaneous Nerve Stimulation-I: Model and Experiment," IEEE Trans. Biomed. Eng., BME-25, pp. 526-531.
5. Cholewiak, R. W. and M. Wollowitz, 1992, "The Design of Vibrotactile Transducers," Whurr Publishers Ltd., pp. 57-82, London.
6. Denton, D. D., A. J. Thiel, L. M. Smith, S. Bajikar, V. White, R. Ghodssi, G. Fish, and L. McCaughan, 1994, "Fabrication of Microstructures for Use in Biological and Optical Applications," Proceeding of the 185th Meeting of the Electrochemical Society Inc., Symposium on Microstructures and Microfabricated Systems, pp. 103-114, San Francisco, CA.
7. Fan, L. S., Y. C. Tai, and R. S. Muller, 1987, "Pin Joints, Gears, Springs, Cranks, and Other Novel Micromechanical Structures," Proceedings of the 4th International Conference on Solid-State Sensors and Actuators, pp. 849-852, Tokyo, Japan.
8. Fujita, H. and A. Omodaka, 1987, "Electrostatic Actuators for Micromechatronics,” Proceeding of IEEE Workshop on Micro Robots and Teleoperators, Hyanis, MA.
9. Ghodssi, R., V. White, C. Herdey, C. Archie, D. D. Denton and L. McCaughan, 1995, "An Optimized LIGA/MEMS Process for Polymer Waveguides on a Linear Micro Actuator," Proceeding of the 188th Meeting of the Electrochemical Society Inc., Symposium on Microstructures and Microfabricated Systems, pp. 141-150, Chicago, IL.
10. Jaecklin, V.P., C. Linder and N.F. de Rooij, 1993, "Optical Microshutters and Torsional Micromirrors for Light Modulator Arrays," Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) Workshop, pp. 124-127, Fort Lauderdale, FL.
11. Kaczmarek, K. A., K. M. Kramer, J. G. Webster and R. G. Radwin, 1991, "A 16-Channel 8-parameter Waveform Electrotactile Stimulation Experiment System," IEEE Trans. Bio. Eng., Vol. 38, No. 10, pp. 933-943.
12. Kim, C. J., A. P. Pisano, R. S. Muller, and M. G. Lim, 1990, "Design, Fabrication and Testing of Polysilicon Microgripper," Proceeding of the ASME Winter Annual Mtg., Symposium on Micro-Mechanical Systems, pp. 99-109, Dallas, TX.
13. Mohr, J., M. Kohl and W. Menz, 1993, "Micro Optical Switching by Electrostatic Linear Microactuators with Large Displacements," Proceedings of the 7th International Conference on Solid-State Sensors and Actuators, pp. 120-123, Yokohama, Japan.
14. Rollman, G. B., 1974, "Electrocutaneous Stimulation," Conference on Cutaneous Communication Systems and Devices.
15. Saggere, L., S. Kota and S.B. Crary, 1994, "A New Design for Suspension of Linear Microactuators," Proceeding of the 1994 ASME Winter Annual Mtg., Symposium on Micro-Mechanical Systems, Vol. 2, pp. 671-675, Chicago, IL.
16. Sherrick, C. E., 1975, "The Art of Tactile Communication," American Psychologist, 30(3): pp. 353-360.
17. Srinivasan, V. A. and R. H. LaMotte, 1987, "Tactile Discrimination of Shape: Responses of Slowly and Rapidly Adapting Mechanoreceptive Afferents to a Step Indented Into the Monkey Fingerpad," The Journal of Neuroscience, Vol. 7, No. 6, pp. 1682-1697.
18. Skrobis, K. J., J. W. Taylor, and R. L. Engelstad, 1995, "Bond Mechanisms and Bond Strengths of Solvent Welded PMMA Sheets for Use as Deep X-Ray Resist in LIGA-Type Processing," Proceeding of the 188th Meeting of the Electrochemical Society Inc., Symposium on Microstructures and Microfabricated Systems, pp. 337-346, Chicago, IL.
19. Szeto, A.Y.J., 1979, "Electrocutaneous Pulse Rate and Pulses Width Psychometric Functions for Sensory Communications," Hum. Fact., Vol. 21, pp. 241-249.
20. Szeto, A.Y.J. and F.A. Sanders 1982. "Electrocutaneous Stimulation for Sensory Communications in Rehabilitation Engineering," IEEE Trans. Biomed. Eng. Vol. 29, No. 4, pp. 300-308.
21. Takeshima, N., K.J. Gabriel, M. Ozaki, J. Takahashi, H. Horiguchi, and H. Fujita, 1991, "Electrostatic Parallelogram Actuators," Proceedings of the 6th International Conference on Solid-State Sensors and Actuators, San Francisco, CA, pp. 63-66.
22. Tang, W.C., T.C.H. Nguyen and R.T. Howe, 1989, "Laterally Driven Polysilicon Resonant Microstructures," Sensors and Actuators, A20, pp. 25-32.
23. Trimmer, W.S.N. and K.J. Gabriel, 1987, "Design Considerations for a Practical Electrostatic Micro-motor," Sensors and Actuators, Vol. A11, pp. 189-206.
24. Weed, H., 1995, Private Communication, Ohio State University.
25. White, V., R. Ghodssi, S. Bajikar, G. Fish, D.D. Denton, and L. McCaughan, 1994, "Development of Optical Devices Using MEMS Technology," Proceeding of the ASME Winter Annual Mtg., Symposium on Micro-Mechanical Systems, pp. 741-746, Chicago, IL.