Trace gas detection with CW cavity ring-down laser absorption spectroscopy

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn 2000-January, Issue , 2000, Pages 203-206

  Yan, Wen Bin ^a   Dudek, J ^b   Lehmann, K ^b   Rabinowitz, P ^b  

^a MEECO   (United States)

^b PRINCETON UNIVERSITY   (United States)

Author keywords

Absorption; Gas lasers; Gases; Impurities; Laser excitation; Laser modes; Optical coupling; Optical resonators; Ring lasers; Spectroscopy

Indexed keywords

ABSORPTION; GAS ABSORPTION; GAS LASERS; GASES; IMPURITIES; LASER EXCITATION; LASER MODES; LIGHT MEASUREMENT; MANUFACTURE; MOISTURE DETERMINATION; OPTICAL RESONATORS; RESONATORS; RING LASERS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DIODES; SEMICONDUCTOR LASERS; SPECTROSCOPY; WATER ABSORPTION;

CAVITY RING DOWN SPECTROSCOPIES; DETECTION SENSITIVITY; ELECTRONIC TRANSITION; LASER ABSORPTION SPECTROSCOPY; MOLECULAR CONCENTRATION; OPTICAL COUPLINGS; PARTS-PER-TRILLION RANGE; SINGLE-MODE DIODE LASER;

ABSORPTION SPECTROSCOPY;

EID: 84949759029     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2000.902588     Document Type: Conference Paper

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