Finite element analysis of tunable Fabry Perot MEMS structures

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn 2000-January, Issue , 2000, Pages 324-327

  Winchester, K J ^a   Dell, J M ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FABRY-PEROT INTERFEROMETERS; MECHANICAL ACTUATORS; MEMS; MICROELECTRONICS;

DEVICE DESIGN; FINITE ELEMENT MODELLING; MECHANICAL RESPONSE; MEMS SYSTEMS; MEMS-STRUCTURE; MEMSDEVICES; OPTIMISATIONS; REFLECTIVE SURFACES;

FINITE ELEMENT METHOD;

EID: 84949748621     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COMMAD.2000.1022954     Document Type: Conference Paper

References (3)

1. D. S. Buet, Finite element analysis, from concepts to applications. 1987, Reading, Mass: Addison-Wesley Pub. Co. xix, 844
2. K. J. Winchester, S. M. R. Spaargaren, and J. M. Dell. Tunable Fabry Perot Cavities. in Interational symposium on microelectronics and assembly. 2000. Singapore: SPIE.
3. D. K. Cheng, Field and wave electromagnetics. 2nd ed. Addison-Wesley series in electical engineering. 1989, Reading, Mass: Addison-Wesley Pub. Co. xvi, 703.