Patterning of GaAs by nanoelectrode lithography

Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003

Volumn , Issue , 2003, Pages 132-133

  Yokoo, Atsushi ^a  

^a NTT Basic Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM ARSENIDE; NANOTECHNOLOGY;

ELECTROCHEMICAL REACTIONS; GAAS; GAAS SURFACES; NANOELECTRODE LITHOGRAPHY; SEM IMAGE;

SEMICONDUCTING GALLIUM;

EID: 84949195553     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2003.1268611     Document Type: Conference Paper

References (2)

1. A. Yokoo, Jpn. 3. AppI. Phys. , 42, L92 (2003).
2. A. Yokoo, Abstract of EIPBN2003, P3-6 (2003)