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Volumn 9781461480549, Issue , 2014, Pages 1-263
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Atomic layer deposition for semiconductors
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER CIRCUITS;
DYNAMIC RANDOM ACCESS STORAGE;
FERROELECTRIC RAM;
LOGIC DEVICES;
SEMICONDUCTOR DEVICE MODELS;
SEMICONDUCTOR DEVICES;
BACK END OF THE LINES;
EMERGING MEMORY;
FRONT END OF THE LINES;
OPERATING PRINCIPLES;
TOOLSETS;
ATOMIC LAYER DEPOSITION;
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EID: 84949180617
PISSN: None
EISSN: None
Source Type: Book
DOI: 10.1007/978-1-4614-8054-9 Document Type: Book |
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Times cited : (119)
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References (0)
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