Non-silicon MEMS platforms for gas sensors

Sensors and Actuators, B: Chemical

Volumn 224, Issue , 2016, Pages 700-713

  Vasiliev, A A ^a,b   Pisliakov, A V ^a   Sokolov, A V ^a   Samotaev, N N ^c   Soloviev, S A ^c   Oblov, K ^c   Guarnieri, V ^d   Lorenzelli, L ^d   Brunelli, J ^e   Maglione, A ^e   Lipilin, A S ^f   Mozalev, A ^g   Legin, A V ^b,h  

^a KURCHATOV INSTITUTE   (Russian Federation)

^b ITMO UNIVERSITY   (Russian Federation)

^c NATIONAL RESEARCH NUCLEAR UNIVERSITY MEPHI   (Russian Federation)

^d ITC IRST   (Italy)

^e OPTOI Microelectronics   (Italy)

^f INSTITUTE OF METALLURGY   (Russian Federation)

^g BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^h ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

Ceramic MEMS; Gas sensors; Microhotplates

Indexed keywords

BOROSILICATE GLASS; CHEMICAL SENSORS; FILMS; GAS DETECTORS; GAS SENSING ELECTRODES; OXIDE FILMS; SILICON; YTTRIA STABILIZED ZIRCONIA; ZIRCONIA;

ANNEALING TEMPERATURES; CONTINUOUS HEATING; ENVIRONMENTAL CONDITIONS; GAS SENSING MATERIAL; HIGH TEMPERATURE; MICROHOTPLATES; SILICON TECHNOLOGIES; THIN CERAMIC FILMS;

CERAMIC MATERIALS;

EID: 84946782314     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2015.10.066     Document Type: Review

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