Development and characterization of electromagnetic micro shutter in MEMS variable optical attenuator

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 63-64

  Dai, Xuhan ^a   Zhao, Xiaolin ^a   Cai, Bingchu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DIFFRACTION; GAUSSIAN BEAMS; MOEMS; MOLECULAR ORBITALS; PHOTORESISTS; QUANTUM CHEMISTRY; WAVE FUNCTIONS;

ALL- OPTICAL NETWORKS; DIFFRACTED BEAMS; DIFFRACTION INTEGRAL; FREE-SPACE DIFFRACTIONS; SACRIFICIAL LAYER; STRUCTURE LAYERS; THEORETICAL CALCULATIONS; VARIABLE OPTICAL ATTENUATORS;

ELECTROMAGNETIC WAVE ATTENUATION;

EID: 84946224629     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031444     Document Type: Conference Paper

References (4)

1. B. Barber et al, "A fiber connectorized MEMS variable optical attenuator", IEEE Photonics Technology Letters, Vol.10, No.9, 1262-1264, Sep. 1998
2. Joseph E. Ford et al, "Dynamic spectral power equalization using micro-opto-mechanics", IEEE Photonics Technology Letters, Vol.10, No.10, 1440-1442, Oct. 1998
3. th ed., Pergamon, Oxford, 1975
4. H.Kogelnik, "Coupling and conversion coefficients for optical modes", Proc. Symp. Quasi-Optics, Brooklyn, Vol.14, 1964, p.333