Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques

Journal of Materials Research

Volumn 1, Issue 6, 1986, Pages 845-851

  Doerner, M F ^a,b   Gardner, D S ^b   Nix, W D ^b  

^a IBM   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84945770363     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1986.0845     Document Type: Article

References (21)

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