Silicon micromechanics: Sensors and actuators on a chip: Remarkable advances in sculpting minute sensors, motors, valves, and pumps from silicon could affect such diverse fields as optical signal processing and magnetic recording technology

IEEE Spectrum

Volumn 27, Issue 7, 1990, Pages 29-31

  Howe, Roger T ^a   Muller, Richard S ^a   Gabriel, Kaigham J ^b   Trimmer, William S N ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRIC MOTORS--FRACTIONAL HORSEPOWER; INTEGRATED CIRCUIT MANUFACTURE--TECHNOLOGY TRANSFER; LITHOGRAPHY--PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON;

PRESSURE SENSOR CHIPS; RESONANT MICROSENSORS; SILICON ACCELEROMETERS; SILICON MICROMECHANICS; SURFACE MICROMACHINING;

ELECTROMECHANICAL DEVICES;

EID: 84944978915     PISSN: 00189235     EISSN: None     Source Type: Journal    
DOI: 10.1109/6.58424     Document Type: Article

References (0)