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Volumn 1, Issue , 2003, Pages 580-582
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Electrostatic actuated interference filters as optical switches for projection display applications
a
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Author keywords
Biomembranes; Displays; Electrostatic interference; Mirrors; Optical design; Optical filters; Optical modulation; Optical reflection; Optical switches; Silicon
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Indexed keywords
ACTUATORS;
DISPLAY DEVICES;
ELECTROSTATICS;
LIGHT MODULATION;
MICROSYSTEMS;
MIRRORS;
MODULATION;
OPTICAL DESIGN;
OPTICAL FILTERS;
SILICON;
SILICON NITRIDE;
SOLID-STATE SENSORS;
TRANSDUCERS;
BIOMEMBRANES;
ELECTROSTATIC INTERFERENCE;
INTERFERENCE FILTERS;
OPTICAL REFLECTION;
OPTIMUM PERFORMANCE;
PROJECTION DISPLAYS;
SILICON NITRIDE MEMBRANE;
SWITCHING ELEMENTS;
OPTICAL SWITCHES;
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EID: 84944753955
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2003.1215383 Document Type: Conference Paper |
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Times cited : (3)
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References (4)
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