Effect of microstructure on detection of dilute NO2 using WO3 thin film sensors

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 524-527

  Tamaki, J ^a   Hayashi, A ^a   Yamamoto, Y ^a   Matsuoka, M ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Gold; Grain size; Microelectrodes; Microstructure; Monitoring; Powders; Roentgenium; Substrates; Temperature sensors; Thin film sensors

Indexed keywords

ACTUATORS; CALCINATION; ELECTRODES; GOLD; GRAIN SIZE AND SHAPE; MICROELECTRODES; MICROSTRUCTURE; MICROSYSTEMS; MONITORING; NITROGEN OXIDES; POWDERS; SUBSTRATES; TEMPERATURE SENSORS; THIN FILMS; TRANSDUCERS;

CALCINATION TEMPERATURE; CONVENTIONAL MODELING; GRAIN SIZE; OPTIMAL THICKNESS; ROENTGENIUM; SENSING PROPERTY; THICKNESS EFFECT; THIN FILM SENSORS;

SOLID-STATE SENSORS;

EID: 84944741840     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215369     Document Type: Conference Paper

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