Hardness detection using a micromachined active tactile sensor

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 927-930

  Hasegawa, Y ^a   Shimizu, T ^a   Miyaji, T ^a   Shikida, M ^a   Sasaki, H ^a   Sato, K ^a   Itoigawa, K ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b Tokai Rika Co Ltd   (Japan)

Author keywords

Capacitive sensors; Force sensors; Image sensors; Immune system; Sensor arrays; Sensor phenomena and characterization; Solid state circuits; Surface texture; Tactile sensors; Transducers

Indexed keywords

ACTUATORS; CAPACITIVE SENSORS; DIAPHRAGMS; HARDNESS; IMAGE SENSORS; IMMUNE SYSTEM; MICROSYSTEMS; SENSOR ARRAYS; SILICONES; TRANSDUCERS;

DETECTION PERFORMANCE; DEVICE CHARACTERISTICS; DEVICE SPECIFICATION; FORCE SENSOR; MICROMACHINING TECHNOLOGIES; SOLID-STATE CIRCUITS; SURFACE TEXTURES; TACTILE SENSORS;

SOLID-STATE SENSORS;

EID: 84944730305     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215627     Document Type: Conference Paper

References (8)

1. K. J. Chun and K. D. Wise, "A capacitive silicon tactile image array", Proc. of the 3rd Int. Conf. on Solid-State Sensors and Actuators, pp. 22-25, 1985.
2. K. Petersen, C. Kowalski, J. Brown, H. Allen, and J. Knutti, "A force sensing chip designed for robotic and manufacturing automation application", Proc. of the 3rd Int. Conf. on Solid-State Sensors and Actuators, pp. 30-32, 1985.
3. B. J. Kane and G. T. A. Kovacs, "A CMOS compatible traction stress sensing element for use in high resolution tactile image", Proc. of the 8th Int. Conf. on Solid-State Sensors and Actuators, pp. 648-651, 1995.
4. Z. Chu, P. M. Sarro, and S. Middlehoek, "Silicon three-axial tactile sensor", Proc. of the 8th Int. Conf. on Solid-State Sensors and Actuators, pp. 656-659, 1995.
5. R. J. De Souza and K. D. Wise, "A very high density bulk micromachined capacitive tactile imager", Proc. of the 9th Int. Conf. on Solid-State Sensors and Actuators, pp. 656-659, 1997.
6. H. Takizawa, H. Tosaka, R. Ohta, S. Kaneko, and Y. Ueda, "Development of a microfine active bending catheter equipped with MIF tactile sensors", Proc. IEEE MEMS'99 conference, pp. 412-417, 1999.
7. M. Maezawa, T. Imahashi, Y. Kuroda, H. Adachi, and K. Yanagisawa, "Tactile sensor using piezoelectric resonator", Proc. of the 9th Int. Conf. on Solid-State Sensors and Actuators, pp. 117-120, 1997.
8. M. Shikida, T. Shimizu, K. Sato, and K. Itoigawa, "Active tactile sensor for detecting contact force and hardness of an object", Sensors and Actuators A, 103, pp. 213-218,2003.