Infrared and ultrasonic sensors using ferroelectric thin films

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 226-229

  Okuyama, M ^a   Yamashita, K ^a   Noda, M ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Binary search trees; Dielectric constant; Dielectric thin films; Ferroelectric films; Ferroelectric materials; Infrared sensors; Semiconductor thin films; Sensor arrays; Temperature sensors; Thin film sensors

Indexed keywords

ACTUATORS; BINARY TREES; DIELECTRIC MATERIALS; FERROELECTRIC FILMS; FERROELECTRIC MATERIALS; FERROELECTRIC THIN FILMS; FERROELECTRICITY; FILMS; INFRARED DETECTORS; INFRARED DEVICES; MICROSYSTEMS; PERMITTIVITY; SENSOR ARRAYS; SILICON WAFERS; TEMPERATURE SENSORS; THIN FILMS; TRANSDUCERS; ULTRASONIC SENSORS;

BINARY SEARCH TREES; DIELECTRIC THIN FILMS; INFRA-RED SENSOR; SEMICONDUCTOR THIN FILMS; THIN FILM SENSORS;

SOLID-STATE SENSORS;

EID: 84944716447     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215294     Document Type: Conference Paper

References (4)

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