Lifetime improvement of Si field emitter arrays by HfC coating

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn 2003-January, Issue , 2003, Pages 33-34

  Nagao, M ^a   Sato, T ^b   Nicolaescu, D ^a   Matsukawa, T ^a   Kanemaru, S ^a   Itoh, J ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84943561446     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVMC.2003.1222969     Document Type: Conference Paper

References (3)

1. T. Sato et al., in Technical Digest of 15th IVMC & 48th IFES, Vol.2, PM.05 (2002).
2. M.Nagao et al., J. Vac. Sci. & Technol., B19, 920 (2001).
3. T. Sato et al, "Influence of ambient gases on HfC-coated Si FEA", 16th IVMC, July7-11, 2003, Osaka, Japan.