Influence of ambient gases on the HfC-coated Si field emitter arrays

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn 2003-January, Issue , 2003, Pages 183-184

  Sato, T ^a   Nagao, M ^b   Matsukawa, T ^b   Kanemaru, S ^b   Itoh, J ^b   Yamamoto, S ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84943532587     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVMC.2003.1223044     Document Type: Conference Paper

References (2)

1. T. Sato et al., in Technical Digest of 15th IVMC & 48th IFES, Vol. 2, PM.05 (2002).
2. D. Temple, Material Science and Engineering, R24, 185 (1999).