Low damage pre-doping on CVD graphene/Cu using a chlorine inductively coupled plasma

Carbon

Volumn 95, Issue , 2015, Pages 664-671

  Pham, Viet Phuong ^a   Kim, Ki Hyun ^b   Jeon, Min Hwan ^a   Lee, Se Han ^a   Kim, Kyong Nam ^b   Yeom, Geun Young ^a,b  

^a Sungkyunkwan University   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

Cl radical; Combined doping; ICP system; Mesh grid; Normal doping; Pre doping; Resistance; Transmittance

Indexed keywords

CHLORINE; ELECTRIC RESISTANCE; INDUCTIVELY COUPLED PLASMA; SHEET RESISTANCE; SURFACE DEFECTS;

CHEMICAL VAPOR DEPOSITED; COMBINED DOPING; CONVENTIONAL DOPING; ICP SYSTEMS; INDUCTIVELY COUPLED PLASMA (ICP); MESH GRIDS; OPTICAL TRANSPARENCY; TRANSMITTANCE;

GRAPHENE;

EID: 84943532339     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2015.08.070     Document Type: Article

References (49)

1. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, and et al. Electric field effect in atomically thin carbon films Science 306 2004 666 669
2. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, M.I. Katsnelson, I.V. Grigorieva, and et al. Two-dimensional gas of massless Dirac fermions in graphene Nature 438 2005 197 200
3. C.R. Dean, A.F. Young, C. Lee, L. Wang, S. Sorgenfrei, and K. Watanabe Boron nitride substrates for high-quality graphene electronics Nat. Nanotech. 5 2010 722 726
4. D.W. Brenner, O.A. Shenderova, J.A. Harrison, J.S. Sttuart, B. Ni, and S.B. Sinnott A second-generation reactive empirical bond order (REBO) potential energy expression for hydrocarbons J. Phys. Condens. Matter 14 2002 783
5. C. Mattevi, H.W. Kim, and M.A. Chhowalla Review of chemical vapour deposition of graphene on copper J. Mater. Chem. 21 2011 3324 3334
6. H. Liu, Y. Liu, and D. Zhu Chemical doping of graphene J. Mater. Chem. 21 2011 3335 3345
7. W. Chen, D. Qi, X. Gao, and A.T.S. Wee Surface transfer doping of semiconductor Prog. Surf. Sci. 84 2009 279 321
8. W.J. Zhao, P.H. Tan, J. Zhang, and J. Liu Charge transfer and optical phonon mixing in few-layer graphene chemically doped with sulfuric acid Phys. Rev. B 82 2010 245423
9. V.M. Gun'ko, V.V. Turov, R.L. Whitby, G.P. Prykhod'ko, A.V. Turov, and S.V. Mikhalovsky Interactions of single and multi-layer graphene oxides with water, methane, organic solvents and HCl studied by 1H NMR Carbon 57 2013 191
10. E. Bouleghlimat, P.R. Davies, R.J. Davies, R. Howarth, J. Kulhavy, and D.J. Morgan The effect of acid treatment on the surface chemistry and topography of graphite Carbon 61 2013 124
11. N.A. Cordero, and J.A. Alonso The interaction of sulfuric acid with graphene and formation of adsorbed crystals Nanotechnology 18 2007 485705
12. W. Zhou, J. Vavro, N.M. Nemes, J.E. Fischer, F. Borondics, K. Kamaras, and et al. Charge transfer and Fermi level shift in p-doped single-walled carbon nanotubes Phys. Rev. B 71 2005 205 423
13. A. Kasry, M.A. Kuroda, G.J. Martyna, G.S. Tulevski, and A.A. Bol Chemical doping of large-area stacked graphene films for use as transparent, conducting electrodes ACS Nano 4 2010 3839
14. 3 functionalization on large scale graphene for enhanced tri-iodide reduction in dye-sensitized solar cells J. Mater. Chem. 22 2012 20490
15. 3-doped graphene J. Appl. Phys. 113 2013 064305
16. K.C. Kwon, B.J. Kim, J. Lee, and S.Y. Kim Effect of anions in Au complexes on doping and degradation of graphene J. Mater. Chem. C 1 2013 2463
17. K.K. Kim, A. Reina, Y. Shi, H. Park, L. Li, Y.H. Lee, and et al. Enhancing the conductivity of transparent graphene films via doping Nanotechnology 21 2010 285205
18. K.C. Kwon, K.S. Choi, and S.Y. Kim Increased work function in few-layer graphene sheets via metal chloride doping Adv. Funct. Mater 22 2012 4724
19. S.M. Kim, Y.W. Jo, K.K. Kim, D.L. Duong, H.J. Shin, J.H. Han, and et al. Transparent organic p-dopant in carbon nanotubes: Bis(triflouromethanesulfonyl)imide ACS Nano 4 2010 6998 7004
20. S. Tongay, K. Berke, M. Lemaitre, Z. Nasrollani, D.B. Tanner, A.F. Hebard, and et al. Stable hole doping of graphene for low electrical resistance and high optical transparency Nanotechnology 22 2011 425701
21. I. Lee, H. Park, J. Park, J. Lee, W. Jung, H. Yu, and et al. Hydrazine-based n-type doping process to modulate Dirac point of graphene and its application to complementary inverter Org. Electron. 14 2013 1586
22. P. Wei, N. Liu, H.R. Lee, E. Adijanto, L. Ci, B.D. Naab, and et al. Tuning the Dirac point in CVD-grown graphene through solution processed n-type doping with 2-(2-methoxyphenyl)-1,3dimethyl-2,3dihydro-1H-benzomidazole Nano Lett. 13 2013 1890
23. X. Dong, D. Fu, W. Fang, Y. Shi, P. Chen, and L. Li Doping single-layer graphene with aromatic molecules Small 5 2009 12
24. F. Gunes, H.J. Shin, C. Biswas, G.H. Han, E.S. Kim, S.J. Chae, and et al. Layer-by-layer doping of few-layer graphene film ACS Nano 4 2010 4595 4600
25. J. Zheng, H.T. Liu, B. Wu, C.A. Di, Y.L. Guo, T. Wu, and et al. Production of graphite chloride and bromide using microwave sparks Sci. Rep. 2 2012 662
26. X. Zhang, A. Hsu, H. Wang, Y. Song, J. Kong, M.S. Dresselhaus, and et al. Impact of chlorine functionalization on high-mobility chemical vapor deposition grown graphene ACS Nano 7 2013 7262 7270
27. J. Wu, L. Xie, Y.G. Li, H.L. Wang, Y. Ouyang, J. Guo, and et al. Controlled chlorine plasma reaction for noninvasive graphene doping J. Am. Chem. Soc. 13 2011 19668 19671
28. B. Li, L. Zhou, D. Wu, H. Peng, K. Yan, and Z.F. Liu Photochemical chlorination of graphene ACS Nano 5 2011 5957 5961
29. Y.D. Lim, D.Y. Lee, T.Z. Shen, C.H. Ra, J.Y. Choi, and W.J. Yoo Si-compatible cleaning process for graphene using low-density inductively coupled plasma ACS Nano 6 2012 4410 4417
30. A. Pirkle, J. Chan, A. Venugopal, D. Hinojos, C.W. Magnuson, S. McDonnell, and et al. The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2 Appl. Phys. Lett. 99 2011 122108
31. J.W. Suk, W.H. Lee, J. Lee, H. Chou, R.D. Piner, Y. Hao, and et al. Enhancement of the electrical properties of graphene grown by chemical vapor deposition via controlling the effects of polymer residue Nano Lett. 13 2013 1462 1467
32. X. Li, Y. Zhu, W. Cai, M. Borysiak, B. Han, D. Chen, and et al. Transfer of large-area graphene films for high-performance transparent conductive electrodes Nano Lett. 9 2009 4359 4363
33. N. Mcevoy, H. Nolan, N.A. Kumar, T. Hallam, and G.S. Duesberg Functionalization of graphene surfaces with downstream plasma treatments Carbon 54 2013 283 290
34. N. Peltekis, S. Kumar, N. Mcevoy, K. Lee, A. Weidlich, and G.S. Duesberg The effect of downstream plasma treatments on graphene surfaces Carbon 50 2012 395 403
35. P. Niranan, S. Marco, D. Alberto, and A. Athanasia Effect of solvents on the dynamic behavior of poly(methyl methacrylate) film prepared by solvent casting J. Mater. Sci. 46 2011 5044 5049
36. L. Xuelei, A.S. Brent, C. Irene, C. Guangjun, A.H. Christina, Z. Qin, and et al. Toward clean and crackles transfer of graphene ACS Nano 5 2011 9144 9153
37. Y.F. Xiao, N. Ryo, C.Y. Li, and T. Katsumi Effects of electron-transfer chemical modification on the electrical characteristics of graphene Nanotechnology 21 2010 475208
38. C. Stephen, R.K. Peter, and J.R. Preston Nanoimprint lithography J. Vac. Sci. Technol. B 14 1996 4129 4133
39. C.L. Yung, C.L. Chun, H.Y. Chao, J. Chuanhong, S. Kazu, and W.C. Po Graphene annealing: How clean can it be? Nano Lett. 12 2012 414 419
40. S.L. Wei, T.N. Chang, and T.L.T. John What does annealing do to metal-graphene contacts? Nano Lett. 14 2014 3840 3847
41. M.W. Iqbal, A.K. Singh, M.Z. Iqbal, and J.H. Eom Raman fingerprint of doping due to metal Adsorbates on graphene J. Phys. Condens. Matter 24 2012 335301
42. Z. Ni, Y. Wang, and Z. Shen Raman spectroscopy and imaging of graphene Nano Res. 1 2008 273 291
43. X. Zhang, T. Schiros, D. Nordlund, Y.C. Shin, J. Kong, M. Dresselhaus, and et al. X-ray spectroscopic investigation of chlorinated graphene: surface structure and electronic effects Adv. Func. Mater 2015 10.1002/adfm.201500541
44. R.R. Nair, P. Blake, A.N. Grogorenko, K.S. Novoselov, T.J. Booth, T. Stauber, and et al. Fine structure constant defines visual transparency of graphene Science 320 2008 1308
45. P. Blake, D.B. Paul, R.N. Rahul, J.B. Tim, J. Da, S. Fred, and et al. Graphene-based liquid crystal device Nano Lett. 8 2008 1704 1708
46. X. Li, C.W. Magnuson, A. Venugopal, J. An, J.W. Suk, B. Han, and et al. Graphene films with large domain size by a two-step chemical vapor deposition process Nano Lett. 10 2010 28 34
47. S.H. Kim, W. Song, M.W. Jung, M.A. Kang, K. Kim, S.J. Chang, and et al. Carbon nanotubes and graphene hybrid thin film for transparent electrodes and field effect transistors Adv. Mater 26 2014 4247 4252
48. D. Choi, C. Kuru, C. Choi, K. Noh, S. Hwang, W. Choi, and et al. Unusually high optical transparency in hexagonal nanopatterned graphene with enhanced conductivity by chemical doping Small 11 2015 3143 3152
49. H. Terrones, R. Lv, M. Terrones, and M.S. Dresselhaus The role of defects and doping in 2D graphene sheets and 1D nanoribbons Rep. Prog. Phys. 75 2012 062501