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Volumn 2003-January, Issue , 2003, Pages 4-5
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Detection of carbon-related bandgap states in GaN using deep level optical spectroscopy
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Author keywords
Doping; Gallium nitride; HEMTs; MOCVD; Molecular beam epitaxial growth; Optical films; Optical materials; Organic materials; Photonic band gap; Spectroscopy
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Indexed keywords
ATMOSPHERIC PRESSURE;
DOPING (ADDITIVES);
ENERGY GAP;
EPITAXIAL GROWTH;
FILMS;
HIGH ELECTRON MOBILITY TRANSISTORS;
MASS SPECTROMETRY;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLECULAR BEAMS;
NITRIDES;
OPTICAL FILMS;
OPTICAL MATERIALS;
PHOTONIC BAND GAP;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTOR DOPING;
SPECTROSCOPY;
CARBON CONCENTRATIONS;
CARBON INCORPORATION;
DEEP LEVEL OPTICAL SPECTROSCOPY;
MOLECULAR BEAM EPITAXIAL GROWTH;
NITRIDE LAYERS;
ORGANIC MATERIALS;
SECONDARY ION MASS SPECTROSCOPIES (SIMS);
SEMI-INSULATING;
GALLIUM NITRIDE;
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EID: 84943530760
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ISCS.2003.1239877 Document Type: Conference Paper |
Times cited : (1)
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References (4)
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