Large-scale two-dimensional MoS2 photodetectors by magnetron sputtering

Optics Express

Volumn 23, Issue 10, 2015, Pages 13580-13586

  Ling, Z P ^a   Yang, R ^a   Chai, J W ^b   Wang, S J ^b   Leong, W S ^a   Tong, Y ^a   Lei, D ^a   Zhou, Q ^a   Gong, X ^a   Chi, D Z ^b   Ang, K W ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; MONOLAYERS; PHOTONS; TRANSITION METALS;

EXTERNAL QUANTUM EFFICIENCY; MOLYBDENUM DISULFIDE; PHOTORESPONSIVITY; PRECISE CONTROL; TRANSITION METAL DICHALCOGENIDES;

PHOTODETECTORS;

EID: 84943370553     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.23.013580     Document Type: Article

References (24)

1. Q. H. Wang, K. Kalantar-Zadeh, A. Kis, J. N. Coleman, and M. S. Strano, "Electronics and optoelectronics of two-dimensional transition metal dichalcogenides, " Nat. Nanotechnol. 7(11), 699-712 (2012).
2. K. S. Novoselov, D. Jiang, F. Schedin, T. J. Booth, V. V. Khotkevich, S. V. Morozov, and A. K. Geim, "Twodimensional atomic crystals, " Proc. Natl. Acad. Sci. U.S.A. 102(30), 10451-10453 (2005).
3. F. H. L. Koppens, T. Mueller, P. Avouris, A. C. Ferrari, M. S. Vitiello, and M. Polini, "Photodetectors based on graphene, other two-dimensional materials and hybrid systems, " Nat. Nanotechnol. 9(10), 780-793 (2014).
4. H. S. Lee, S.-W. Min, Y.-G. Chang, M. K. Park, T. Nam, H. Kim, J. H. Kim, S. Ryu, and S. Im, "MoS2 nanosheet phototransistors with thickness-modulated optical energy gap, " Nano Lett. 12(7), 3695-3700 (2012).
5. Z. Yin, H. Li, H. Li, L. Jiang, Y. Shi, Y. Sun, G. Lu, Q. Zhang, X. Chen, and H. Zhang, "Single-layer MoS2 phototransistors, " ACS Nano 6(1), 74-80 (2012).
6. S. H. Yu, Y. Lee, S. K. Jang, J. Kang, J. Jeon, C. Lee, J. Y. Lee, H. Kim, E. Hwang, S. Lee, and J. H. Cho, "Dyesensitized MoS2 photodetector with enhanced spectral photoresponse, " ACS Nano 8(8), 8285-8291 (2014).
7. O. Lopez-Sanchez, D. Lembke, M. Kayci, A. Radenovic, and A. Kis, "Ultrasensitive photodetectors based on monolayer MoS2, " Nat. Nanotechnol. 8(7), 497-501 (2013).
8. W. Zhang, C.-P. Chuu, J.-K. Huang, C.-H. Chen, M.-L. Tsai, Y.-H. Chang, C.-T. Liang, Y.-Z. Chen, Y.-L. Chueh, J.-H. He, M.-Y. Chou, and L.-J. Li, "Ultrahigh-Gain Photodetectors Based on Atomically Thin Graphene-MoS2 Heterostructures, " Sci. Rep. 4, 3826 (2014).
9. F. Xia, H. Wang, D. Xiao, M. Dubey, and A. Ramasubramaniam, "Two-dimensional material nanophotonics, " Nat. Photonics 8(12), 899-907 (2014).
10. Y.-H. Lee, X.-Q. Zhang, W. Zhang, M.-T. Chang, C.-T. Lin, K.-D. Chang, Y.-C. Yu, J. T.-W. Wang, C.-S. Chang, L.-J. Li, and T.-W. Lin, "Synthesis of large-area MoS2 atomic layers with chemical vapor deposition, " Adv. Mater. 24(17), 2320-2325 (2012).
11. Y. Zhan, Z. Liu, S. Najmaei, P. M. Ajayan, and J. Lou, "Large-Area Vapor-Phase Growth and Characterization of MoS2 Atomic Layers on a SiO2 Substrate, " Small 8(7), 966-971 (2012).
12. K.-K. Liu, W. Zhang, Y.-H. Lee, Y.-C. Lin, M.-T. Chang, C.-Y. Su, C.-S. Chang, H. Li, Y. Shi, H. Zhang, C.-S. Lai, and L.-J. Li, "Growth of large-area and highly crystalline MoS2 thin layers on insulating substrates, " Nano Lett. 12(3), 1538-1544 (2012).
13. J. Jeon, S. K. Jang, S. M. Jeon, G. Yoo, Y. H. Jang, J.-H. Park, and S. Lee, "Layer-controlled CVD growth of large-area two-dimensional MoS2 films, " Nanoscale 7(5), 1688-1695 (2015).
14. J. Tao, J. Chai, X. Lu, L. M. Wong, T. I. Wong, J. Pan, Q. Xiong, D. Chi, and S. Wang, "Growth of wafer-scale MoS2 monolayer by magnetron sputtering, " Nanoscale 7(6), 2497-2503 (2015).
15. G. Eda, H. Yamaguchi, D. Voiry, T. Fujita, M. Chen, and M. Chhowalla, "Photoluminescence from chemically exfoliated MoS2, " Nano Lett. 11(12), 5111-5116 (2011).
16. L. Yang, X. Cui, J. Zhang, K. Wang, M. Shen, S. Zeng, S. A. Dayeh, L. Feng, and B. Xiang, "Lattice strain effects on the optical properties of MoS2 nanosheets, " Sci. Rep. 4, 5649 (2014).
17. K. F. Mak, C. Lee, J. Hone, J. Shan, and T. F. Heinz, "Atomically thin MoS2: A new direct-gap semiconductor, " Phys. Rev. Lett. 105(13), 136805 (2010).
18. W. Choi, M. Y. Cho, A. Konar, J. H. Lee, G.-B. Cha, S. C. Hong, S. Kim, J. Kim, D. Jena, J. Joo, and S. Kim, "High-detectivity multilayer MoS2 phototransistors with spectral response from ultraviolet to infrared, " Adv. Mater. 24(43), 5832-5836 (2012).
19. F. Xia, T. Mueller, Y. M. Lin, A. Valdes-Garcia, and P. Avouris, "Ultrafast graphene photodetector, " Nat. Nanotechnol. 4(12), 839-843 (2009).
20. F. Xia, T. Mueller, R. Golizadeh-Mojarad, M. Freitag, Y. M. Lin, J. Tsang, V. Perebeinos, and P. Avouris, "Photocurrent imaging and efficient photon detection in a graphene transistor, " Nano Lett. 9(3), 1039-1044 (2009).
21. R. Yang, Z. Wang, and P. X. L. Feng, "Electrical breakdown of multilayer MoS2 field-effect transistors with thickness-dependent mobility, " Nanoscale 6(21), 12383-12390 (2014).
22. N. Perea-López, Z. Lin, N. R. Pradhan, A. Iñiguez-Rábago, A. L. Elías, A. McCreary, J. Lou, P. M. Ajayan, H. Terrones, L. Balicas, and M. Terrones, "CVD-grown monolayered MoS2 as an effective photosensor operating at low-voltage, " 2D Materials (Basel) 1(1), 011004 (2014).
23. D.-S. Tsai, K.-K. Liu, D.-H. Lien, M.-L. Tsai, C.-F. Kang, C.-A. Lin, L.-J. Li, and J.-H. He, "Few-Layer MoS2 with high broadband Photogain and fast optical switching for use in harsh environments, " ACS Nano 7(5), 3905-3911 (2013).
24. Perkin Elmer, "Silicon avalanche photodiodes C30902 series " (2015), http://www.perkinelmer.com/cmsresources/images/44-3477dts-c30902.pdf.