The impact of technology errors on the operability of the micromechanical gyroscope

International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings

Volumn 2003-January, Issue , 2003, Pages 49-51

  Kazakin, A N ^a   Lubeznov, V S ^a   Karelin, A ^b  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

^b Gyrooptics JSC   (Russian Federation)

Author keywords

Chemical sensors; Chemical technology; Gyroscopes; Laboratories; Manufacturing; Mechanical sensors; Micromechanical devices; Resonance; Resonant frequency; Silicon

Indexed keywords

CHEMICAL SENSORS; GYROSCOPES; LABORATORIES; MANUFACTURE; NATURAL FREQUENCIES; RESEARCH LABORATORIES; RESONANCE; SILICON;

CHEMICAL TECHNOLOGIES; MECHANICAL SENSORS; MEMS GYRO; MICRO-MECHANICAL; MICROMECHANICAL DEVICE; MICROTECHNOLOGY; RESONANCE MODE; SENSITIVITY THRESHOLD;

ELECTRON DEVICES;

EID: 84943189202     PISSN: 18153712     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SREDM.2003.1224180     Document Type: Conference Paper

References (5)

1. Barbure N., Connelly I., Gilmore I., Greiff P., Kourepenis A., Weinberg M., Microelectromechanical instrument and systems development at Draper Laboratory, 3-nd St. Petersburg International conf. on gyroscopic technology and navigation, May 1995, p. 3-10.
2. Lestev A.M., Popova I.V., Current theory state and microgyro R&D. Gyroscopia and Navigacia, No3 (26), 1999, c. 81-94. (in Russian)
3. Pyatyhev E.N., Lurie M.S., Popova I.V., Kazakin A.N., MEMS specificity technology, Applied physics, No 2, 2000 r., page 133-137. (in Russian)
4. Borovkov A.I., Pyatyshev E.N., Lurie M.S., Perejaslavets E.V., Lunev V.P., Kazakin A.N., Popova I.V., Lestiev A.M., Microscale Effects of "Silicon-on-Glass" Micromechanical Devices. Experimental Results and 3D Finite Element Modeling, Proceeding of SPIE, Vol. 4348, 361-368 (2001).
5. G. K. Ananthasuresh, A glimpse of MEMS // Presented to MEAM 550 (Fall 2001) students Univer. of Pennsylvania, Sept. 2001