History of semiconductors diffusion engineering

10th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2002

Volumn , Issue , 2002, Pages 209-241

  Lojek, B ^a  

^a ATMEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; HEAT TREATMENT;

BELL TELEPHONE LABORATORIES; DIFFUSION FURNACE; FAIRCHILD; TEXAS INSTRUMENTS;

TRANSISTORS;

EID: 84943165041     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RTP.2002.1039463     Document Type: Conference Paper

References (0)