Scalable microfabrication procedures for adhesive-integrated flexible and stretchable electronic sensors

Sensors (Switzerland)

Volumn 15, Issue 9, 2015, Pages 23459-23476

  Kang, Dae Y ^a   Kim, Yun Soung ^a   Ornelas, Gladys ^a   Sinha, Mridu ^a   Naidu, Keerthiga ^a   Coleman, Todd P ^a  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

Author keywords

Flexible electronics; Flexible sensors; Peel off; Roll to roll

Indexed keywords

FABRICATION; MICROANALYSIS; MICROFABRICATION; SILICONES; SUBSTRATES;

CARRIER SUBSTRATE; FABRICATION PROCEDURE; FABRICATION YIELD; FLEXIBLE SENSOR; POST PROCESSING; ROLL TO ROLL; STRETCHABLE ELECTRONICS; UNCONVENTIONAL APPROACHES;

FLEXIBLE ELECTRONICS;

ADHESIVE AGENT; GLASS;

CHEMISTRY; DEVICES; ELASTICITY; ELECTRONICS; EQUIPMENT DESIGN; GENETIC PROCEDURES; MICROTECHNOLOGY; PLIABILITY; PROCEDURES;

ADHESIVES; BIOSENSING TECHNIQUES; ELASTICITY; ELECTRONICS; EQUIPMENT DESIGN; GLASS; MICROTECHNOLOGY; PLIABILITY;

EID: 84942027997     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s150923459     Document Type: Article

References (71)

1. Søndergaard, R.R.; Hösel, M.; Krebs, F.C. Roll-to-roll fabrication of large area functional organic materials. J. Polym. Sci. Part B Polym. Phys. 2013, 51, 16–34.
2. Metters, J.P.; Kadara, R.O.; Banks, C.E. New directions in screen printed electroanalytical sensors: An overview of recent developments. Analyst 2011, 136, 1067–1076.
3. Harada, S.; Honda, W.; Arie, T.; Akita, S.; Takei, K. Fully printed, highly sensitive multifunctional artificial electronic whisker arrays integrated with strain and temperature sensors. ACS Nano 2014, 8, 3921–3927.
4. Windmiller, J.R.; Bandodkar, A.J.; Valdés-Ramírez, G.; Parkhomovsky, S.; Martinez, A.G.; Wang, J. Electrochemical sensing based on printable temporary transfer tattoos. Chem. Commun. 2012, 48, 6794–6796.
5. Bandodkar, A.J.; Molinnus, D.; Mirza, O.; Guinovart, T.; Windmiller, J.R.; Valdés-Ramírez, G.; Andradec, F.J.; Schöning, M.J.; Wang, J. Epidermal tattoo potentiometric sodium sensors with wireless signal transduction for continuous non-invasive sweat monitoring. Biosens. Bioelectron. 2014, 54, 603–609.
6. Martínez-Olmos, A.; Fernández-Salmerón, J.; Lopez-Ruiz, N.; Torres, A.R.; Capitan-Vallvey, L.F.; Palma, A.J. Screen printed flexible radiofrequency identification tag for oxygen monitoring. Anal. Chem. 2013, 85, 11098–11105.
7. Foster, C.W.; Metters, J.P.; Kampouris, D.K.; Banks, C.E. Ultraflexible screen-printed graphitic electroanalytical sensing platforms. Electroanalysis 2014, 26, 262–274.
8. Kim, D.-H.; Lu, N.; Ma, R.; Kim, Y.-S.; Kim, R.-H.; Wang, S.; Wu, J.; Won, S.M.; Tao, H.; Islam, A.; et al. Epidermal electronics. Science 2011, 333, 838–843.
9. Kim, D.-H.; Kim, Y.-S.; Wu, J.; Liu, Z.; Song, J.; Kim, H.-S.; Huang, Y.Y.; Hwang, K.-C.; Rogers, J.A. Ultrathin silicon circuits with strain-isolation layers and mesh layouts for high-performance electronics on fabric, vinyl, leather, and paper. Adv. Mater. 2009, 21, 3703–3707.
10. Ying, M.; Bonifas, A.P.; Lu, N.; Su, Y.; Li, R.; Cheng, H.; Ameen, A.; Huang, Y.; Rogers, J.A. Silicon nanomembranes for fingertip electronics. Nanotechnology 2012, doi:10.1088/0957-4484/23/34/344004.
11. Son, D.; Lee, J.; Qiao, S.; Ghaffari, R.; Kim, J.; Lee, J.E.; Song, C.; Kim, S.J.; Lee, D.J.; Jun, S.W.; et al. Multifunctional wearable devices for diagnosis and therapy of movement disorders. Nat. Nanotechnol. 2014, 9, 397–404.
12. Jang, K.-I.; Chung, H.U.; Xu, S.; Lee, C.H.; Luan, H.; Jeong, J.; Cheng, H.; Kim, G.-T.; Han, S.Y.; Lee, J.W.; et al. Soft network composite materials with deterministic and bio-inspired designs. Nat. Commun. 2015, doi:10.1038/ncomms7566.
13. Xu, S.; Zhang, Y.; Cho, J.; Lee, J.; Huang, X.; Jia, L.; Fan, J.A.; Su, Y.; Su, J.; Zhang, H.; et al. Stretchable batteries with self-similar serpentine interconnects and integrated wireless recharging systems. Nat. Commun. 2013, doi:10.1038/ncomms2553.
14. Jeong, J.-W.; Kim, M.K.; Cheng, H.; Yeo, W.-H.; Huang, X.; Liu, Y.; Zhang, Y.; Huang, Y.; Rogers, J.A. Capacitive epidermal electronics for electrically safe, long-term electrophysiological measurements. Adv. Healthcare Mater. 2014, 3, 642–648.
15. Kim, J.; Banks, A.; Cheng, H.; Xie, Z.; Xu, S.; Jang, K.-I.; Lee, J.W.; Liu, Z.; Gutruf, P.; Huang, X.; et al. Epidermal electronics with advanced capabilities in near-field communication. Small 2015, 8, 1–7.
16. Jang, K.-I.; Han, S.Y.; Xu, S.; Mathewson, K.E.; Zhang, Y.; Jeong, J.-W.; Kim, G.-T.; Webb, R.C.; Lee, J.W.; Dawidczyk, T.J.; et al. Rugged and breathable forms of stretchable electronics with adherent composite substrates for transcutaneous monitoring. Nat. Commun. 2014, doi:10.1038/ncomms5779.
17. Lee, S.-K.; Kim, B.J.; Jang, H.; Yoon, S.C.; Lee, C.; Hong, B.H.; Rogers, J.A.; Cho, J.H.; Ahn, J.-H. Stretchable graphene transistors with printed dielectrics and gate electrodes. Nano Lett. 2011, 11, 4642–4646.
18. Viventi, J.; Kim, D.-H.; Moss, J.D.; Kim, Y.-S.; Blanco, J.A.; Annetta, N.; Hicks, A.; Xiao, J.; Huang, Y.; Callans, D.J.; et al. A conformal, bio-interfaced class of silicon electronics for mapping cardiac electrophysiology. Sci. Transl. Med. 2010, 2, 1–9.
19. Viventi, J.; Kim, D.-H.; Vigeland, L.; Frechette, E.S.; Blanco, J.A.; Kim, Y.-S.; Avrin, A.E.; Tiruvadi, V.R.; Hwang, S.-W.; Vanleer, A.C.; et al. Flexible, foldable, actively multiplexed, high-density electrode array for mapping brain activity in vivo. Nat. Neurosci. 2011, 14, 1599–1605.
20. Li, T.; Suo, Z.; Lacour, S.P.; Wagner, S. Compliant thin film patterns of stiff materials as platforms for stretchable electronics. J. Mater. Res. 2005, 20, 3274–3277.
21. Ware, T.; Simon, D.; Hearon, K.; Liu, C.; Shah, S.; Reeder, J.; Khodaparast, N.; Kilgard, M.P.; Maitland, D.J.; Rennaker, R.L., II; et al. Three-dimensional flexible electronics enabled by shape memory polymer substrates for responsive neural interfaces. Macromol. Mater. Eng. 2012, 297, 1193–1202.
22. Simon, D.; Ware, T.; Marcotte, R.; Lund, B.R.; Smith, D.W.; di Prima, M.; Rennaker, R.L.; Voit, W. A comparison of polymer substrates for photolithographic processing of flexible bioelectronics. Biomed. Microdevices 2013, 15, 925–939.
23. Lipomi, D.J.; Vosgueritchian, M.; Tee, B.C.-K.; Hellstrom, S.L.; Lee, J.A.; Fox, C.H.; Bao, Z. Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes. Nat. Nanotechnol. 2011, 6, 788–792.
24. Schwartz, G.; Tee, B.C.-K.; Mei, J.; Appleton, A.L.; Kim, D.H.; Wang, H.; Bao, Z. Flexible polymer transistors with high pressure sensitivity for application in electronic skin and health monitoring. Nat. Commun. 2013, doi:10.1038/ncomms2832.
25. Kaltenbrunner, M.; Sekitani, T.; Reeder, J.; Yokota, T.; Kuribara, K.; Tokuhara, T.; Drack, M.; Schwödiauer, R.; Graz, I.; et al. An ultra-lightweight design for imperceptible plastic electronics. Nature 2013, 499, 458–463.
26. Jeong, G.S.; Baek, D.-H.; Jung, H.C.; Song, J.H.; Moon, J.H.; Hong, S.W.; Kim, I.Y.; Lee, S.-H. Solderable and electroplatable flexible electronic circuit on a porous stretchable elastomer. Nat. Commun. 2012, doi:10.1038/ncomms1980.
27. Forrest, S.R. The Path to ubiquitous and low-cost organic electronic appliances on plastic. Nature 2004, 428, 911–918.
28. Kim, S.H.; Yoon, J.; Yun, S.O.; Hwang, Y.; Jang, H.S.; Ko, H.C. Ultrathin sticker-type ZnO thin film transistors formed by transfer printing via topological confinement of water-soluble sacrificial polymer in dimple structure. Adv. Funct. Mater. 2013, 23, 1475–1482.
29. Linder, V.; Gates, B.D.; Ryan, D.; Parviz, B.A.; Whitesides, G.M. Water-soluble sacrificial layers for surface micromachining. Small. 2005, 1, 730–736.
30. Yim, K.H.; Zheng, Z.; Liang, Z.; Friend, R.H.; Huck, W.T.S.; Kim, J.-S. Efficient conjugated-polymer optoelectronic devices fabricated by thin-film transfer-printing technique. Adv. Funct. Mater. 2008, 18, 1012–1019.
31. Zhao, B.; Ji, G.; Gao, X. Transfer printing of magnetic structures with enhanced performance using a new type of water-soluble sacrificial layer. RSC Adv. 2015, 5, 56959–56966.
32. Carlson, A.; Bowen, A.M.; Huang, Y.; Nuzzo, R.G.; Rogers, J.A. Transfer printing techniques for materials assembly and micro/nanodevice fabrication. Adv. Mater. 2012, 24, 5284–5318.
33. Yeo, W.-H.; Kim, Y.-S.; Lee, J.; Ameen, A.; Shi, L.; Li, M.; Wang, S.; Ma, R.; Jin, S.H.; et al. multifunctional epidermal electronics printed directly onto the skin. Adv. Mater. 2013, 25, 2773–2778.
34. Idustrial Internet of Things: Unleashing the Potential of Connected Products and Services. Available online: http://www3.weforum.org/docs/WEFUSA_IndustrialInternet_Report2015.pdf (accessed on 22 January 2015).
35. Atzori, L.; Iera, A.; Morabito, G. The Internet of Things: A Survey. Comput. Networks 2010, 54, 2787–2805.
36. Novoselov, K.S.; Geim, A.K.; Morozov, S.V.; Jiang, D.; Zhang, Y.; Dubonos, S.V.; Grigorieva, I.V.; Firsov, A.A. Electric field effect in atomically thin carbon films. Science 2004, 306, 666–669.
37. Fujita, K.; Yasuda, T.; Tsutsui, T. Flexible organic field-effect transistors fabricated by the electrode-peeling transfer with an assist of self-assembled monolayer. Appl. Phys. Lett. 2003, 82, 4373–4375.
38. Ilic, B.; Craighead, H.G. Topographical patterning of chemically sensitive biological materials using a polymer-based dry lift off. Biomed. Microdevices 2000, 2, 317–322.
39. Defranco, J.A.; Schmidt, B.S.; Lipson, M.; Malliaras, G.G. Photolithographic patterning of organic electronic materials. Org. Electron. 2006, 7, 22–28.
40. Yoon, J.; Baca, A.J.; Park, S.-I.; Elvikis, P.; Geddes, J.B., III; Li, L.; Kim, R.H.; Xiao, J.; Wang, S.; Kim, T.-H.; et al. Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs. Nat. Mater. 2008, 7, 907–915.
41. Park, S.-I.; Xiong, Y.; Kim, R.-H.; Elvikis, P.; Meitl, M.; Kim, D.-H.; Wu, J.; Yoon, J.; Yu, C.-J.; Liu, Z.; et al. Printed assemblies of inorganic light-emitting diodes for deformable and semitransparent displays. Science 2009, 325, 977–981.
42. Chung, H.-J.; Kim, T.-I.; Kim, H.-S.; Wells, S.A.; Jo, S.; Ahmed, N.; Jung, Y.H.; Won, S.M.; Bower, C.A.; Rogers, J.A. Fabrication of releasable single-crystal silicon–metal oxide field-effect devices and their deterministic assembly on foreign substrates. Adv. Funct. Mater. 2011, 21, 3029–3036.
43. Van Krevelen, D.W.; te Nijenhuis, K. Properties of Polymers; Elsevier: Amsterdam, The Netherlands, 2009.
44. Bowden, N.; Brittain, S.; Evans, A.G.; Hutchinson, J.W.; Whitesides, G.M. Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer. Nature 1998, 393, 146–149.
45. Huck, W.T.S.; Bowden, N.; Onck, P.; Pardoen, T.; Hutchinson, J.W.; Whitesides, G.M. Ordering of spontaneously formed buckles on planar surfaces. Langmuir 2000, 16, 3497–3501.
46. Lacour, S.P.; Jones, J.; Wagner, S.; Li, T.; Suo, Z. Strechable interconnects for elastics electronic surfaces. IEEE Proc. 2005, 93, 1459–1466.
47. Adrega, T.; Lacour, S.P. Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization. J. Micromech. Microeng. 2010, 20, 055025–055033.
48. Niedermeyer, E.; Lopes da Silva, F.H. Electroencephalography: Basic Principles, Clinical Applications, and Related Fields; Lippincott Williams & Wilkins: Philadelphia, PA, USA, 2012.
49. McAdams, E.T.; Jossinet, J.; Subramanian, R.; McCauley, R.G.E. Characterization of gold electrodes in phosphate buffered saline solution by impedance and noise measurements for biological applications. In Proceedings of the 28th IEEE EMBS Annual International Conference, New York, NY, USA, 30 August–3 September 2006.
50. Tallgrena, P.; Vanhataloa, S.; Kailaa, K.; Voipioa, J. Evaluation of commercially available electrodes and gels for recording of slow EEG potentials. Clin. Neurophysiol. 2005, 116, 799–806.
51. Ba, D.; Babadi, B.; Purdon, P.L.; Brown, E.N. Robust spectrotemporal decomposition by Iteratively reweighted least squares. Proc. Natl. Acad. Sci. USA. 2014, 111, E5336–E5345.
52. Liao, L.-D.; Wang, I.-J.; Chen, S.-F.; Chang, J.-Y.; Lin, C.-T. Design, fabrication and experimental validation of a novel dry-contact sensor for measuring electroencephalography signals without skin preparation. Sensors 2011, 11, 5819–5834.
53. Zhou, J.; Gu, Y.; Fei, P.; Mai, W.; Gao, Y.; Yang, R.; Bao, G.; Wang, Z.L. Flexible piezotronic strain sensor. Nano Lett. 2008, 8, 3035–3040.
54. Chang, N.-K.; Su, C.-C.; Chang, S.-H. Fabrication of single-walled carbon nanotube flexible strain sensors with high sensitivity. Appl. Phys. Lett. 2008, 92, doi:10.1063/1.2841669.
55. Patel, J.N.; Kaminska, B.; Gray, B.L.; Gates, B.D. A sacrificial SU-8 mask for direct metallization on PDMS. J. Micromech. Microeng. 2009, 19, 115014–115024.
56. Patel, J.N.; Kaminska, B.; Gray, B.L.; Gates, B.D. PDMS as a sacrificial substrate for SU-8-based biomedical and microfluidic applications. J. Micromech. Microeng. 2008, 18, 095028–095039.
57. Melzer, M.; Karnaushenko, D.; Lin, G.; Baunack, S.; Makarov, D.; Schmidt, O. Direct transfer of magnetic sensor devices to elastomeric supports for stretchable electronics. Adv. Mater. 2015, 27, 1333–1338.
58. McDonald, J.C.; Duffy, D.C.; Anderson, J.R.; Chiu, D.T.; Wu, H.; Schueller, O.J.A.; Whitesides, G.M. Fabrication of microfluidic systems in poly (dimethylsiloxane). Electrophoresis 2000, 21, 27–40.
59. Schmid, H.; Wolf, H.; Allenspach, R.; Riel, H.; Karg, S.; Michel, B.; Delamarche, E. Preparation of metallic films on elastomeric stamps and their application for contact processing and contact printing. Adv. Funct. Mater. 2003, 13, 145–153.
60. Sun, Y.; Lacour, S.P.; Brooks, R.A.; Rushton, N.; Fawcett, J.; Cameron, R.E. Assessment of the biocompatibility of photosensitive polyimide for implantable medical device use. J. Biomed. Mater. Res. Part A 2009, 90, 648–655.
61. Harbert, M.J.; Rosenberg, S.S.; Mesa, D.; Sinha, M.; Karanjia, N.P.; Nespeca, M.; Coleman, T.P. Demonstration of the use of epidermal electronics in neurological monitoring. Ann. Neurol. 2013, 74, S76–S77.
62. Merrill, D.R.; Bikson, M.; Jeffrys, J.G.R. Design, electrical stimulation of excitable tissue: Design of efficacious and safe protocols. J. Neurosci. Method. 2005, 141, 171–198.
63. Ghomashchi, A.; Zheng, Z.; Majaj, N.; Trumpis, M.; Kiorpes L.; Viventi, J. A low-cost, open-source, wireless electrophysiology system. In Proceedings of 36th Annual International Conference of the IEEE: Engineering in Medicine and Biology Society (EMBC), Chicago, IL, USA, 26–30 August 2014.
64. Escabí, M.A.; Read, H.L.; Viventi, J.; Kim, D.-H.; Higgins, N.C.; Storace, D.A.; Liu, A.S.K.; Gifford, A.M.; Burke, J.F.; Campisi, M.; et al. A high-density, high-channel count, multiplexed μ ECoG array for auditory-cortex recordings. J. Neurophysiol. 2014, 112, 1566–1583.
65. Mercier, P.P.; Lysaght, A.C.; Bandyopadhyay, S.; Chandrakasan, A.P.; Stankovic, K.M. Energy extraction from the biologic battery in the inner ear. Nat. Biotechnol. 2012, 30, 1240–1244.
66. Report to the President: Accelerating U.S. Advanced Manufacturing. Available online: http://www.whitehouse.gov/sites/default/files/microsites/ostp/PCAST/amp20_report_final.pdf (accessed on 30 October 2014).
67. Flexible Hybrid Electronics Manufacturing Innovation (FHEMI) Institute. Available online: http://manufacturing.gov/docs/fhemi-faq.pdf (accessed on 1 April 2015).
68. Patrito, N.; McLachlan, J.M.; Faria, S.N.; Chan, J.; Norton, P.R. A novel metal-protected plasma treatment for the robust bonding of polydimethylsiloxane. Lab Chip 2007, 7, 1813–1818.
69. Efimenko, K.; Wallace, W.E.; Genzer, J. Surface modification of sylgard-184 poly(dimethyl siloxane) networks by ultraviolet and ultraviolet/ozone treatment. J. Coll. Interface Sci. 2002, 254, 306–315.
70. Ginn, B.T.; Steinbock, O. Polymer surface modification using microwave-oven-generated plasma brent. Langmuir 2003, 19, 8117–8118.
71. Armani, D.; Liu, C.; Aluru, N. Re-configurable fluid circuits by PDMS elastomer micromachining. In Proceedings of the 12th IEEE International Conference: Micro Electro Mechanical Systems, Orlando, FL, USA, 17–21 January 1999.