Defect diagnostic matrix - A defect learning vehicle for submicron technologies

IEEE International Conference on Microelectronic Test Structures

Volumn 1988-February, Issue , 1988, Pages 103-106

  Newhart, Ronald E ^a   Sprogis, Edmund J ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; PATTERN RECOGNITION;

BIT MAPS; DEFECT MONITORING; FUNCTIONAL TEST; RAPID ISOLATION; STRUCTURAL PARTS; SUBMICRON TECHNOLOGIES; TEST SITE;

DEFECTS;

EID: 84941868124     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.1988.672943     Document Type: Conference Paper

References (1)

1. C. H. Stapper, "On Yield, Fault Distributions, and Clustering of Particles", IBM Journal of Research and Development, May 1986.