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Volumn 8, Issue 10, 1987, Pages 463-466

Design and Experimental Technology for 0.1-μm Gate-Length Low-Temperature Operation FET's

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EID: 84941448723     PISSN: 07413106     EISSN: 15580563     Source Type: Journal    
DOI: 10.1109/EDL.1987.26695     Document Type: Article
Times cited : (107)

References (11)
  • 2
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    • Transconductance degradation in thin-oxide MOSFET's
    • G. Baccarani and M. R. Wordeman, “Transconductance degradation in thin-oxide MOSFET's,” IEEE Trans. Electron Devices, vol. ED-30, p. 1295, 1983.
    • (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 1295
    • Baccarani, G.1    Wordeman, M.R.2
  • 3
    • 0020765706 scopus 로고
    • Effect of the electron temperature on the gate-induced charge in small size MOS transistors
    • J. P. Leburton and G. Dorda, “Effect of the electron temperature on the gate-induced charge in small size MOS transistors,” Solid-State Electron. vol. 26, p. 611, 1983.
    • (1983) Solid-State Electron , vol.26 , pp. 611
    • Leburton, J.P.1    Dorda, G.2
  • 4
    • 0021406605 scopus 로고
    • Generalized scaling theory and its application to a 1/4 micrometer MOSFET design
    • G. Baccarani, M. R. Wordeman, and R. H. Dennard, “Generalized scaling theory and its application to a 1/4 micrometer MOSFET design,” IEEE Trans. Electron Devices, vol. ED-31, p. 452, 1984.
    • (1984) IEEE Trans. Electron Devices , vol.ED-31 , pp. 452
    • Baccarani, G.1    Wordeman, M.R.2    Dennard, R.H.3
  • 5
    • 84941456080 scopus 로고
    • Lithography for ultra short channel silicon FET circuits
    • (Woodland Hills, CA), May
    • S. A. Rishton et al., “Lithography for ultra short channel silicon FET circuits,” in Proc. 31st Int. Symp. Electron, Ion, and Photon Beams (Woodland Hills, CA), May 1987.
    • (1987) Proc. 31st Int. Symp. Electron, Ion, and Photon Beams
    • Rishton, S.A.1
  • 7
    • 0013453520 scopus 로고
    • Device-grade ultra-shallow junctions fabricated with antimony
    • G. A. Sai-Halasz and H. B. Harrison, “Device-grade ultra-shallow junctions fabricated with antimony,” IEEE Electron Device Lett., vol. EDL-7, p. 534, 1986.
    • (1986) IEEE Electron Device Lett. , vol.EDL-7 , pp. 534
    • Sai-Halasz, G.A.1    Harrison, H.B.2
  • 8
    • 0022306901 scopus 로고
    • Extremely high transconductance (above 500 mS/mm) MOSFET with 2.5 nm gate oxide
    • S. Horiguchi, T. Kobayashi, M. Miyaki, M. Ode, and K. Kiuchi, “Extremely high transconductance (above 500 mS/mm) MOSFET with 2.5 nm gate oxide,” in IEDM Tech. Dig., 1985, p. 761.
    • (1985) IEDM Tech. Dig. , pp. 761.
    • Horiguchi, S.1    Kobayashi, T.2    Miyaki, M.3    Ode, M.4    Kiuchi, K.5
  • 9
    • 0022184756 scopus 로고
    • Observation of electron velocity overshoot in sub-100 nm-channel MOSFET's in silicon
    • S. Y. Chou, D. A. Antoniadis, and H. I. Smith, “Observation of electron velocity overshoot in sub-100 nm-channel MOSFET's in silicon,” IEEE Electron Device Lett., vol. EDL-6, p. 665, 1985.
    • (1985) IEEE Electron Device Lett. , vol.EDL-6 , pp. 665
    • Chou, S.Y.1    Antoniadis, D.A.2    Smith, H.I.3
  • 10
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    • Electron velocity overshoot at 300 K and 77 K in silicon MOSFET's with submicron channel lengths.” in
    • G. G. Shahidi, D. A. Antoniadis, and H. I. Smith, “Electron velocity overshoot at 300 K and 77 K in silicon MOSFET's with submicron channel lengths.” in IEDM Tech. Dig., 1986, p. 824.
    • (1986) IEDM Tech. Dig. , pp. 824.
    • Shahidi, G.G.1    Antoniadis, D.A.2    Smith, H.I.3
  • 11
    • 0022043305 scopus 로고
    • Two-dimensional analysis of velocity overshoot effects in ultrashort-channel Si MOSFET's
    • T. Kobayashi and K. Saito. “Two-dimensional analysis of velocity overshoot effects in ultrashort-channel Si MOSFET's,” IEEE Trans. Electron Devices, vol. ED-32, p. 788, 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , pp. 788
    • Kobayashi, T.1    Saito, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.