Low temperature growth of carbon nanotube by thermal CVD with FeZrN catalyst

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn 2003-January, Issue , 2003, Pages 13-14

  Shiroishi, Tetsuya ^a   Sawada, Takao ^a   Hosono, Akihiko ^a   Nakata, Shuhei ^a   Kanazawa, Yasunori ^b   Takai, Mikio ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84940201316     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVMC.2003.1222959     Document Type: Conference Paper

References (3)

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2. O. Shimizu, K. Nakanishi and. S. Yoshida, J. Appl. Phys. 70, 6244(1991)
3. A. Chakraborty, K. R. Mountfield, G. H. Bellesis, D. N. Lambeth, and M. H. Kryder, J. Appl. Phys. 80, 1012(1996)