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Volumn 33, Issue 6, 1986, Pages 1185-1190

Generation of interface states by ionizing radiation in very thin MOS oxides

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[No Author keywords available]

Indexed keywords


EID: 84939068629     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/TNS.1986.4334576     Document Type: Article
Times cited : (94)

References (35)
  • 9
    • 0020751109 scopus 로고
    • May
    • S.K. Lai, J. Appl. Phys. vol. 54, p. 2540, May 1983
    • (1983) J. Appl. Phys , vol.54 , pp. 2540
    • Lai, S.K.1
  • 11
    • 0019540960 scopus 로고
    • for reviews of radiation effects in oxides, T.P. Ma, “ Semiconductor Silicon ”, The Electrochemical Society, p. 427, 1981
    • for reviews of radiation effects in oxides, see: P. Balk and N. Klein, Thin Solid Films vol. 89, p. 329, 1982; and T.P. Ma, “Semiconductor Silicon”, The Electrochemical Society, p. 427, 1981.
    • (1982) Thin Solid Films , vol.89 , pp. 329
    • Balk, P.1    Klein, N.2
  • 12
    • 84939068956 scopus 로고
    • Colloque International des Journees D'Electronique
    • Toulouse, France, March 7–10
    • H.L. Hughes, “Colloque International des Journees D'Electronique”, Conference on Radiation Effects on Semiconductor Components, Toulouse, France, March 7–10, 1967, p. B3-1.
    • (1967) Conference on Radiation Effects on Semiconductor Components , pp. B3-1
    • Hughes, H.L.1
  • 16
    • 84939012945 scopus 로고    scopus 로고
    • private communication
    • H.L. Hughes, private communication.
    • Hughes, H.L.1
  • 23
    • 0004277486 scopus 로고
    • MOS Physics and Technology
    • John Wiley and Sons
    • E.H. Nicollian and J.R. Brews, “MOS Physics and Technology”, John Wiley and Sons, 1982, p. 285.
    • (1982) , pp. 285
    • Nicollian, E.H.1    Brews, J.R.2
  • 24
    • 84939043794 scopus 로고    scopus 로고
    • The slopes of the etchback samples (Fig. 4) have been determined by least squares fit with the errors representing 95% confidence levels (student's t-test). The slopes of the as-grown oxides (Fig. 5) were set by drawing the apparent asymptotes
    • The slopes of the etchback samples (Fig. 4) have been determined by least squares fit with the errors representing 95% confidence levels (student's t-test). The slopes of the as-grown oxides (Fig. 5) were set by drawing the apparent asymptotes.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.