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Volumn 34, Issue 6, 1987, Pages 1751-1756

Wafer mapping of total dose failure thresholds in a bipolar recessed field oxide technology

Author keywords

[No Author keywords available]

Indexed keywords


EID: 84939058488     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/TNS.1987.4337549     Document Type: Article
Times cited : (3)

References (3)
  • 2
    • 84939049344 scopus 로고
    • Semiconductor Measurement Technology: A FORTRAN Program for Analysis of Data from Microelectronic Test Structures
    • July
    • Mattis, R. L., Semiconductor Measurement Technology: A FORTRAN Program for Analysis of Data from Microelectronic Test Structures, NBS Special Publication 400–75 (July 1983).
    • (1983) NBS Special Publication 400–75
    • Mattis, R.L.1
  • 3
    • 0020890075 scopus 로고
    • Comparison of Cobalt 60 Response and 10 KeV X-Ray Response in MOS Capacitors
    • December
    • Oldham, and McGarrity, “Comparison of Cobalt 60 Response and 10 KeV X-Ray Response in MOS Capacitors”, IEEE Transactions on Nuclear Science, December 1983.
    • (1983) IEEE Transactions on Nuclear Science
    • Oldham, O.1    McGarrity, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.