A high-performance ultra-thin quarter-micron CMOS/SIMOX technology

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1993, Pages 25-26

  Ohno, Terukazu ^a   Kado, Yuichi ^a   Harada, Mitsuru ^a   Tsuchiya, Toshiaki ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; LOW POWER ELECTRONICS; VLSI CIRCUITS;

CMOS CIRCUITS; FULLY DEPLETED; LOW POWER SUPPLY VOLTAGE; METALLIZATION TECHNIQUES; POLY-SI GATES; PROPAGATION DELAY TIME; RING OSCILLATOR; SUPPLY VOLTAGES;

MOSFET DEVICES;

EID: 84938439816     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VLSIT.1993.760227     Document Type: Conference Paper

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7. T. Amazawa et al., IEDM Tech. Dig., p. 265 (1991).