Ion implantation in β-sic: Effect of channeling direction and critical energy for amorphization

Journal of Materials Research

Volumn 3, Issue 2, 1988, Pages 321-328

  Edmond, J A ^a   Davis, R F ^a   Withrow, S P ^b   More, K L ^c  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c OAK RIDGE ASSOCIATED UNIVERSITIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84936506097     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1988.0321     Document Type: Article

References (18)

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