Influence of charge trapping on AC reliability of high-k dielectrics

IEEE International Reliability Physics Symposium Proceedings

Volumn 2004-January, Issue January, 2004, Pages 585-586

  Kerber, M ^a   Duschl, R ^a   Reisinger, H ^a   Jakschik, S ^a   Schroder U ^a   Hecht, T ^a   Kudelka, S ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; WEIBULL DISTRIBUTION;

AC STRESS; DRAM CAPACITOR; FREQUENCY DEPENDENT; HIGH-K DIELECTRIC; LIFETIME REDUCTION; LOWER VOLTAGES; TRAPPING CHARACTERISTIC;

RELIABILITY;

EID: 84932185035     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2004.1315401     Document Type: Conference Paper

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