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Volumn 5, Issue 6, 1988, Pages 773-781

Systematic and random errors in rotating-analyzer ellipsometry

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EID: 84931505041     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.5.000773     Document Type: Article
Times cited : (85)

References (15)
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    • Azzam, R.M.A.1    Bashara, N.M.2
  • 2
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    • Unified analysis of ellipsometry errors due to imperfect components, cell-window birefringence, and incorrect azimuth angles
    • R. M. A. Azzam and N. M. Bashara, "Unified analysis of ellipsometry errors due to imperfect components, cell-window birefringence, and incorrect azimuth angles," J. Opt. Soc. Am. 61, 600-607 (1971).
    • (1971) J. Opt. Soc. Am. , vol.61 , pp. 600-607
    • Azzam, R.M.A.1    Bashara, N.M.2
  • 3
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    • Azzam, R.M.A.1    Bashara, N.M.2
  • 5
    • 0015112741 scopus 로고
    • Measurement and correction of first-order errors in ellipsometry
    • D. E. Aspnes, "Measurement and correction of first-order errors in ellipsometry," J. Opt. Soc. Am. 61, 1077-1085 (1971).
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    • Aspnes, D.E.1
  • 6
    • 49149142584 scopus 로고
    • The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers
    • A. Straaijer, L. J. Hanekamp, and G. A. Bootsma, "The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers," Surf. Sci. 96, 217-231 (1980).
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  • 7
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    • Analyses and corrections of instrumental errors in ellipsometry
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    • McCrackin, F.L.1
  • 8
    • 0346598540 scopus 로고
    • Present status of automatic ellipsometers
    • R. H. Muller, "Present status of automatic ellipsometers," Surf. Sci. 56, 19-36 (1976).
    • (1976) Surf. Sci. , vol.56 , pp. 19-36
    • Muller, R.H.1
  • 9
    • 0001632353 scopus 로고
    • Generalized rotating compensator ellipsometry
    • P. S. Hauge, "Generalized rotating compensator ellipsometry," Surf. Sci. 56, 148-160 (1976).
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    • Hauge, P.S.1
  • 10
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    • High precision scanning ellipsometer
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    • Aspnes, D.E.1    Studna, A.A.2
  • 11
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    • Design and operation of an automated, high-temperature ellipsometer
    • Y. I. van der Meulen and N. C. Hien, "Design and operation of an automated, high-temperature ellipsometer," J. Opt. Soc. Am. 64, 804-811 (1974).
    • (1974) J. Opt. Soc. Am. , vol.64 , pp. 804-811
    • van der Meulen, Y.I.1    Hien, N.C.2
  • 12
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    • Analysis of systematic errors in rotating-analyzer ellipsometers
    • R. M. A. Azzam and N. M. Bashara, "Analysis of systematic errors in rotating-analyzer ellipsometers," J. Opt. Soc. Am. 64, 1459-1469 (1974).
    • (1974) J. Opt. Soc. Am. , vol.64 , pp. 1459-1469
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  • 13
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    • Optimizing precision of rotating-analyzer ellipsometers
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  • 14
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    • Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers
    • D. E. Aspnes, "Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers," J. Opt. Soc. Am. 64, 812-819 (1974).
    • (1974) J. Opt. Soc. Am. , vol.64 , pp. 812-819
    • Aspnes, D.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.