Nanofabrication: Techniques and principles

Nanofabrication: Techniques and Principles

Volumn 9783709104248, Issue , 2014, Pages 1-344

  Stepanova, Maria ^a   Dew, Steven ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS;

ETCHING PATTERN; MICROELECTRONICS FABRICATION; NANO SCALE; NANOMETER CONTROL; NOVEL DEVICES; SCIENTISTS AND ENGINEERS; STATE OF THE ART;

NANOTECHNOLOGY;

EID: 84930889113     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-3-7091-0424-8     Document Type: Book

References (0)